Fabrication of glass suspended microchannel resonators
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Multilayered niobium oxynitride films were deposited onto (100) Si using DC magnetron sputtering with a reactive gas pulsing process. The argon and nitrogen flows were kept constant during sputtering of a pure niobium target and the oxygen flow was pulsed ...
The invention relates to an effusing source for film deposition made of a reservoir comprising one hole characterized by the fact that the hole diameter is less than one order of magnitude than the mean free path of the molecules determined by the pressure ...
Medical grade poly(vinyl chloride) was modified by RF plasma-deposition of teflon-like coatings to create a platform for the physisorption of PEO-containing copolymers, Pluronics (R). Thin teflon-like coatings were deposited in an RF-plasma reactor by plas ...
We report on a study of pentacene thin-films grown by high vacuum deposition on silicon dioxide, using atomic force microscopy (AFM) and transmission electron microscopy (TEM). The nucleation density of pentacene islands on SiO2is found to rise ...
(001)-textured AIN thin films as needed for longitudinal bulk acoustic wave (BAW) devices exhibit large mechanical stress variations and large orientation variation as a function of growth substrate properties. We prepared thin silicon and silicon dioxide ...
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa2008
Strontium barium niobate (SrxBa1-xNb2O6, shortly SBN) is a solid solution system with tetragonal tungsten bronze crystal structure. It exhibits a ferroelectric phase with only one polar axis and a transition temperature depending on the Sr/Ba ratio. This t ...
Nanostencil lithography is a flexible, rapid and resistless patterning method based on a high-resolution shadow mask. It allows for a wide choice of materials and surfaces to be structured and on the contrary to deep-ultraviolet (DUV), x-ray, electron beam ...
A flexible method for simultaneous nanoscale structures fabrication and patterning is described, using a combination of stencil mask and pulsed-laser deposition (PLD) techniques. A miniature shadow-mask with nano-apertures in a very thin microfabricated me ...
2004
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A novel two-step method was developed to prep. gold nanoparticles on boron-doped diamond (BDD) electrode. It consisted of sputter deposition of max. 15 equiv monolayers of gold, followed by a heat treatment at 400-600 Deg in air. The as-sputtered gold depo ...
The authors address feature-size dependence in Ar/Cl2 chemically assisted ion beam etching (CAIBE) in the context of the fabrication of photonic crystal (PhC) structures. They systematically investigate the influence of various parameters such a ...