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The objective of this semester project is to investigate different fabrication processes and materials used for the fabrication of piezoelectric electrodes. More in detail, to investigate if the use of test wafers and high resistivity wafers play a role on the quality of the contacts for the micro electrodes and the difference in the quality of the deposition of the bottom electrode between two different equipments, namely SPIDER and DP650.
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Anna Fontcuberta i Morral, Lucas Güniat, Valerio Piazza, Wonjong Kim