Publication

Design and simulation of a silicon microfabricated photoacoustic gas sensor

Philippe Renaud
1998
Conference paper

Abstract

We present the modeling and simulation of a photoacoustic sensor. Starting from detailed simulations of the microsystem components, i.e, the IR-source, the cavity, and the microphone, we present a global simulation of the detector. The temperature profile in the photoacoustic cavity has been studied. Analytical key design rules for optimization of the detector's performance are discussed.

Official source

https://infoscience.epfl.ch/record/53994?ln=en

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Design and simulation of a silicon microfabricated photoacoustic gas sensor

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