Publications related to Polyimide and SU-8 microfluidic devices manufactured by heat- depolymerizable sacrificial material technique

Fabrication of LTCC Micro-fluidic Devices Using Sacrificial Carbon Layers

Peter Ryser, Thomas Maeder, Caroline Jacq, Hansu Birol, Yannick Sébastien Fournier, Giancarlo Corradini, Reynald Passerini

Ease of fabrication and design flexibility are two attractive features of low temperature co-fired ceramics (LTCC) technology for fabrication of complex micro-fluidic devices. Such structures are designed and processed using different shaping methods, the ...

2005

Partial release and detachment of microfabricated metal and polymer structures by anodic metal dissolution

Philippe Renaud, Arnaud Bertsch, Stefan Metz

The large majority of microelectromechanical systems (MEMS) are fabricated on silicon, glass or Pyrex substrates by manufacturing techniques, which originated from the semiconductors industry. However, their final application often requires removal of the ...

2005

Monolithic Three-Dimensional Integration of Micro-Fluidic Channels and Optical Waveguides in Fused Silica

Yves Bellouard

This paper presents dramatic improvements in the micro-fabrication of three-dimensional microfluidic channels and high-aspect ratio tunnels within the bulk of a fused silica substrate. We also report the fabrication of optical waveguides within the same su ...

2003

Performance of an Integrated Microoptical System for Fluorescence Detection in Microfluidic Systems

Nico de Rooij, Hans Peter Herzig, René Dändliker

This article presents a new integrated microfluidic/microoptic device designed for basic biochemical analysis. The microfluidic network is Wet-etched in a Borofloat 33 (Pyrex) glass wafer and sealed by means of a second wafer. Unlike other similar microflu ...

2002

Manufacture of micro-electro-mechanical-system using sacrificial layer made of silicon, useful for micro-electro-mechanical-system device architecture, e.g. radio-frequency capacitive switch and current switch

Cyrille Hibert, Philippe Flückiger

NOVELTY - A micro-electro-mechanical-system (MEMS) is manufactured by the use of a sacrificial layer that is made of silicon. USE - The invention is used in surface micromachining for the manufacture of a MEMS containing a suspended metal layer or MEMS dev ...

2002

Multi-layer microfluidic glass chips for microanalytical applications

Nico de Rooij, Rolf Wüthrich, Valia Fascio

A new, versatile architecture is presented for microfluidic devices made entirely from glass, for use with reagents which would prove highly corrosive for silicon. Chips consist of three layers of glass wafers bonded together by fusion bonding. On the insi ...

2001

Free-standing, mobile 3D porous silicon microstructures

Philippe Renaud, Gerhard Lammel

This paper suggests a new fabrication method for surface micromachining based on porous silicon formation followed by electropolishing. in contrast to its known use as a sacrificial layer, in this work, porous silicon will be employed as constitutive mater ...

2000

On the Decomposition of Polychotomies into Dichotomies

Many important classification problems are emphpolychotomies, emphi.e. the data are organized into

K

classes with

K>2

. Given an unknown function

F : Omega to {1, dots, K}

representing a polychotomy, an algorithm aimed at ``learning'' this polychotomy ...

Morgan Kaufmann1997

On the Decomposition of Polychotomies into Dichotomies

Many important classification problems are \emph{polychotomies}, \emph{i.e.} the data are organized into

K

classes with

K>2

. Given an unknown function

F : Ømega \to \{1, \dots, K\}

representing a polychotomy, an algorithm aimed at ``learning'' this p ...

IDIAP1996

Polyimide and SU-8 microfluidic devices manufactured by heat- depolymerizable sacrificial material technique

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Fabrication of LTCC Micro-fluidic Devices Using Sacrificial Carbon Layers

Partial release and detachment of microfabricated metal and polymer structures by anodic metal dissolution

Monolithic Three-Dimensional Integration of Micro-Fluidic Channels and Optical Waveguides in Fused Silica

Performance of an Integrated Microoptical System for Fluorescence Detection in Microfluidic Systems

Manufacture of micro-electro-mechanical-system using sacrificial layer made of silicon, useful for micro-electro-mechanical-system device architecture, e.g. radio-frequency capacitive switch and current switch

Multi-layer microfluidic glass chips for microanalytical applications

Free-standing, mobile 3D porous silicon microstructures

On the Decomposition of Polychotomies into Dichotomies

On the Decomposition of Polychotomies into Dichotomies

Performance of an Integrated Microoptical System for Fluorescence Detection in Microfluidic Systems

On the Decomposition of Polychotomies into Dichotomies

On the Decomposition of Polychotomies into Dichotomies

Free-standing, mobile 3D porous silicon microstructures

Manufacture of micro-electro-mechanical-system using sacrificial layer made of silicon, useful for micro-electro-mechanical-system device architecture, e.g. radio-frequency capacitive switch and current switch

Monolithic Three-Dimensional Integration of Micro-Fluidic Channels and Optical Waveguides in Fused Silica

Fabrication of LTCC Micro-fluidic Devices Using Sacrificial Carbon Layers

Multi-layer microfluidic glass chips for microanalytical applications

Partial release and detachment of microfabricated metal and polymer structures by anodic metal dissolution