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Exploring microstencils for sub-micron patterning using pulsed laser deposition

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Jacobi elliptic functions

In mathematics, the Jacobi elliptic functions are a set of basic elliptic functions. They are found in the description of the motion of a pendulum (see also pendulum (mathematics)), as well as in the design of electronic elliptic filters. While trigonometric functions are defined with reference to a circle, the Jacobi elliptic functions are a generalization which refer to other conic sections, the ellipse in particular. The relation to trigonometric functions is contained in the notation, for example, by the matching notation for .

Lemniscate elliptic functions

In mathematics, the lemniscate elliptic functions are elliptic functions related to the arc length of the lemniscate of Bernoulli. They were first studied by Giulio Fagnano in 1718 and later by Leonhard Euler and Carl Friedrich Gauss, among others. The lemniscate sine and lemniscate cosine functions, usually written with the symbols sl and cl (sometimes the symbols sinlem and coslem or sin lemn and cos lemn are used instead), are analogous to the trigonometric functions sine and cosine.

Physical vapor deposition

Physical vapor deposition (PVD), sometimes called physical vapor transport (PVT), describes a variety of vacuum deposition methods which can be used to produce thin films and coatings on substrates including metals, ceramics, glass, and polymers. PVD is characterized by a process in which the material transitions from a condensed phase to a vapor phase and then back to a thin film condensed phase. The most common PVD processes are sputtering and evaporation.

Substrate (materials science)

Substrate is a term used in materials science and engineering to describe the base material on which processing is conducted. This surface could be used to produce new film or layers of material such as deposited coatings. It could be the base to which paint, adhesives, or adhesive tape is bonded. A typical substrate might be rigid such as metal, concrete, or glass, onto which a coating might be deposited. Flexible substrates are also used. With all coating processes, the condition of the surface of the substrate can strongly affect the bond of subsequent layers.

Nome (mathematics)

In mathematics, specifically the theory of elliptic functions, the nome is a special function that belongs to the non-elementary functions. This function is of great importance in the description of the elliptic functions, especially in the description of the modular identity of the Jacobi theta function, the Hermite elliptic transcendents and the Weber modular functions, that are used for solving equations of higher degrees. The nome function is given by where and are the quarter periods, and and are the fundamental pair of periods, and is the half-period ratio.

Sputter deposition

Sputter deposition is a physical vapor deposition (PVD) method of thin film deposition by the phenomenon of sputtering. This involves ejecting material from a "target" that is a source onto a "substrate" such as a silicon wafer. Resputtering is re-emission of the deposited material during the deposition process by ion or atom bombardment. Sputtered atoms ejected from the target have a wide energy distribution, typically up to tens of eV (100,000 K).

Pulsed laser

Pulsed operation of lasers refers to any laser not classified as continuous wave, so that the optical power appears in pulses of some duration at some repetition rate. This encompasses a wide range of technologies addressing a number of different motivations. Some lasers are pulsed simply because they cannot be run in continuous mode. In other cases the application requires the production of pulses having as large an energy as possible.

Laser ablation

Laser ablation or photoablation (also called laser blasting) is the process of removing material from a solid (or occasionally liquid) surface by irradiating it with a laser beam. At low laser flux, the material is heated by the absorbed laser energy and evaporates or sublimates. At high laser flux, the material is typically converted to a plasma. Usually, laser ablation refers to removing material with a pulsed laser, but it is possible to ablate material with a continuous wave laser beam if the laser intensity is high enough.

Excimer laser

An excimer laser, sometimes more correctly called an exciplex laser, is a form of ultraviolet laser which is commonly used in the production of microelectronic devices, semiconductor based integrated circuits or "chips", eye surgery, and micromachining. Since 1960s excimer lasers are widely used in high-resolution photolithography machines, one of the critical technologies required for microelectronic chip manufacturing. The term excimer is short for 'excited dimer', while exciplex is short for 'excited complex'.

Laser

A laser is a device that emits light through a process of optical amplification based on the stimulated emission of electromagnetic radiation. The word laser is an anacronym that originated as an acronym for light amplification by stimulated emission of radiation. The first laser was built in 1960 by Theodore Maiman at Hughes Research Laboratories, based on theoretical work by Charles H. Townes and Arthur Leonard Schawlow. A laser differs from other sources of light in that it emits light that is coherent.