Publication
Evaporation through shadow masks (nanostencils) overcomes the limitations typically given by patterning methods involving conventional optical lithography and etching, such as diffraction limits and etch-selectivity. This paper demonstrates the fabrication of metal cantilevers with sub-micron dimensions using direct evaporation through miniature nanostencils, followed by dry etching to release metal nanolevers from substrate.
Niels Quack, Hamed Sattari, Gergely Huszka, Anton Lagosh, Benedikt Guldimann