Etching of sub-micrometer structures through Stencil

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The Michelangelo step: removing scalloping and tapering effects in high aspect ratio through silicon vias

Edoardo Charbon, Sandro Carrara, Simone Frasca, Rebecca Camilla Leghziel

We present here, for the first time, a fabrication technique that allows manufacturing scallop free, non-tapered, high aspect ratio in through-silicon vias (TSVs) on silicon wafers. TSVs are among major technology players in modern high-volume manufacturin ...

Nature Research2021

Shining Diamond: from Micro- and Nano-Engineering to Quantum Photonics

Sichen Mi

The discovery of room-temperature single photon emission from color centers in diamond has in recent years boosted research interest in this renowned material in photonics and quantum community and beyond. Following understanding some basic principles of h ...

EPFL2021

Real- and Q-space travelling: multi-dimensional distribution maps of crystal-lattice strain (epsilon(044)) and tilt of suspended monolithic silicon nanowire structures

Yusuf Leblebici, Antonia Neels, Alex Dommann, Zuhal Tasdemir, Simone Dolabella

Silicon nanowire-based sensors find many applications in micro- and nano-electromechanical systems, thanks to their unique characteristics of flexibility and strength that emerge at the nanoscale. This work is the first study of this class of micro- and na ...

INT UNION CRYSTALLOGRAPHY2020

Hybrid Si3N4-LiNbO3 integrated platform for electro-optic conversion

Tobias Kippenberg, Rui Ning Wang, Mikhail Churaev, Junqiu Liu, Tianyi Liu

We demonstrate the integration of a Si3N4 Damascene photonic platform with thin-film lithium niobate on insulator (LNOI) via direct wafer bonding. This process enables fabrication of hybrid chi((2))-chi((3)) microresonators with Q similar to 10(6), as well ...

IEEE2020

Wafer-Scale Fabrication of Nanopore Devices for Single-Molecule DNA Biosensing using MoS2

Aleksandra Radenovic, Andras Kis, Martina Lihter, Mukesh Kumar Tripathi, Mukeshchand Thakur, Andrey Chernev, Michael Graf, Michal Daniel Macha, Jochem Deen

Atomically thin (2D) nanoporous membranes are an excellent platform for a broad scope of academic research. Their thickness and intrinsic ion selectivity (demonstrated for example in molybdenum disulfide-MoS2) make them particularly attractive for single-m ...

2020

On the assessment of aspheric refractive microlenses

Jeremy Béguelin

Refractive microlenses and microlens arrays are key components for many applications such as optical data communication, laser and medical devices, or cameras. In particular, refractive micro-optics enables the miniaturization of high-tech systems but also ...

EPFL2020

All-Printed Electrocorticography Array for In Vivo Neural Recordings

Diego Ghezzi, Eleonora Borda, Laura Ferlauto, Fabian Michael Lütolf, Nenad Marjanovic

Bioelectronic and neuroprosthetic interfaces rely on implanted microelectrode arrays (MEAs) to interact with the human body. Printing techniques, such as inkjet and screen printing, are attractive methods for the manufacturing of MEAs because they allow fl ...

2020

Dielectric Actuation Techniques at the Nanoscale: Piezoelectricity and Flexoelectricity

Kaitlin Marie Howell

Micro- and nanoelectromechanical systems (MEMS/NEMS) have long shown their potential to disrupt the established technologies. Over the past 15 years, MEMS have become fundamental components in filters, accelerometers, gyroscopes and gas sensors. MEMS are n ...

EPFL2019

Crystallization of gas-selective nanoporous graphene by competitive etching and growth: a modeling study

Kumar Varoon Agrawal, Soumajit Dutta

A robust synthesis methodology for crystallizing nanoporous single-layer graphene hosting a high density of size-selective nanopores is urgently needed to realize the true potential of two-dimensional membranes for gas separation. Currently, there are no c ...

Nature Research2019

From university to industry - challenges in upscaling optical microstructures for daylight redirection in buildings

Andreas Schueler, André Gabriel Kostro, Josef Andreas Schuler, Philippe Couty

In this paper we present some of the challenges faced when upscaling optical microstructures from a lab scale 1x1 cm sized proof of concept sample to a square meter sized object that can be installed in a building. The optical microstructure in question is ...

IOP Science2019

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