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All-photoplastic microstencil with self-alignment for multiple layer shadow-mask patterning

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All-photoplastic microstencil with self-alignment for multiple layer shadow-mask patterning

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Biomolecule Patterning on Analytical Devices: A Microfabrication-Compatible Approach

Method for fabricating micromirror for barcode reader, involves forming holes having diameter less than width of arms on both side of micromirror and wafer and on edges of region separating wafer and micromirror by etching arms

Inexpensive and fast wafer-scale fabrication of nanohole arrays in thin gold ﬁlms for plasmonics

Fabrication of 150 nm half-pitch grating templates for nanoimprint lithography

Focussed ion beam based fabrication of micro-electro-mechanical resonators

Fabrication of MEMS Resonators in Thin SOI

Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching

Fluorine based plasma treatment of biocompatible silicone elastomer. Effect of temperature on etch rate and surface properties

Low-power hermetically sealed on-chip plasma light source micromachined in glass

Low-power hermetically sealed on-chip plasma light source micromachined in glass

Fabrication of 150 nm half-pitch grating templates for nanoimprint lithography

Fluorine based plasma treatment of biocompatible silicone elastomer. Effect of temperature on etch rate and surface properties

Biomolecule Patterning on Analytical Devices: A Microfabrication-Compatible Approach

Method for fabricating micromirror for barcode reader, involves forming holes having diameter less than width of arms on both side of micromirror and wafer and on edges of region separating wafer and micromirror by etching arms

Fabrication of MEMS Resonators in Thin SOI

Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching

Low-power hermetically sealed on-chip plasma light source micromachined in glass

Low-power hermetically sealed on-chip plasma light source micromachined in glass

Focussed ion beam based fabrication of micro-electro-mechanical resonators

Inexpensive and fast wafer-scale fabrication of nanohole arrays in thin gold ﬁlms for plasmonics