Publication
We report here a new method to release functional SU-8 micro-cantilevers with embedded metal electrodes from the surface, based on isotropic SF6 dry etching of a poly-silicon sacrificial layer. This new fast and clean release technique allows a reproducible fabrication of SU-8 structures with integrated metal devices without risk of damage or altering their performance.
Aleksandra Radenovic, Andras Kis, Martina Lihter, Mukesh Kumar Tripathi, Mukeshchand Thakur, Andrey Chernev, Michael Graf, Michal Daniel Macha, Jochem Deen
Luis Guillermo Villanueva Torrijo, Damien Maillard, Göran Stemme, Simone Pagliano