Structuration of micro-fluidic devices based on low temperature co-fired ceramic (LTCC) technology
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This thesis aimed at developing new 3D structuration techniques for a relatively recent new ceramic technology called LTCC, which stands for Low Temperature, Co-fired Ceramic. It is a material originally developed for the microelectronic packaging industry ...
Anewmicrosystem with the ability to detect magnetic microstructures based on the non-invasive Hall principle is presented. The micro-Hall plate embedded in the microsystem and scaled down to the physical limits of the employedCMOStechnology has an active a ...
Micro-molding can be used for the cost-effective fabrication of elements such as active or passive components in MEMS devices, hydrophobic surfaces, cell-growth scaffolds or optical components such micro-lens arrays and gratings. This method is also partic ...
This work presents the preliminary results on application of mineral sacrificial layer that is prepared to structure LTCC (low temperature co-fired ceramic). The proposed method suggests utilization of a sacrificial paste, which remains "permanent" during ...
SU-8 and polydimethylsiloxane (PDMS) are both transparent materials with properties very convenient for rapid prototyping of microfluidic systems. However, previous efforts of combining these two materials failed due to poor adhesion between them. Herein, ...
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The purpose of this paper is to demonstrate sensors and structures fabricated using the LTCC technology, which has been addressed and employed increasingly as a smart packaging approach for several applications. The focus will be on inclination and cantile ...
The invention relates to novel polymer-based microstructures, with outstanding shape accuracy and cost-effective processing. The novel polymers are based on hyperbranched macromolecules and enable remarkable property combination such as reduced shrinkage a ...
The development of nanosystems and nano-devices demands for patterning methods in the nanoscale. To bring them to the market, there is a need for fast, low-cost nanopatterning methods. In addition, an increased flexibility is important for the engineering ...
Low-cost and high-resolution on-chip microscopes are vital for reducing cost and improving efficiency for modern biomedicine and bioscience. Despite the needs, the conventional microscope design has proven difficult to miniaturize. Here, we report the impl ...
Creating many different complex structures from a single prepattern is achieved from either a master mold or stamping onto a solid substrate by patterning with a PDMS replica mold. Various metal patterns including ellipses, dots, rings, chains of dots (or ...