Publication

Processing and properties of thin film pyroelectric devices

Nava Setter, Paul Muralt, Peter Ryser, Thomas Maeder
1995
Journal paper

Abstract

Pyroelectric PbTiO3 thin films devices with two temperature compensating elements on a SiO2/Si3N4 membranes have been fabricated and characterized. The measured voltage responsivity as a function of radiation modulation frequency has been compared to finite element model calculation. The relevant film properties have been compared for sputter and a sol-gel deposition techniques. The calculated responsivity amounts to 30 V/W. The measured pyroelectric signal is a few mu V.

Official source

https://infoscience.epfl.ch/record/88831?ln=en

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