Publication
Conducting barrier electrodes for direct contact of PZT thin films on tungsten
Related publications (32)
Measurement of effective piezoelectric coefficients of PZT thin films for energy harvesting application with interdigitated electrodes
Paul Muralt, Andrea Mazzalai, Nachiappan Chidambaram
Interdigitated electrode (IDE) systems with lead zirconate titanate (PZT) thin films play an increasingly important role for two reasons: first, such a configuration generates higher voltages than parallel plate capacitor-type electrode (PPE) structures, a ...
Institute of Electrical and Electronics Engineers2012Dielectric and acoustical high frequency characterisation of PZT thin films
Pb(Zr, Ti)O-3 (PZT) is an interesting material for bulk acoustic wave resonator applications due to its high electromechanical coupling constant, which would enable fabrication of large bandwidth frequency filters. The major challenge of the PZT solid solu ...
Iop Publishing Ltd, Dirac House, Temple Back, Bristol Bs1 6Be, England2010High coupling materials for thin film bulk acoustic wave resonators
Radio frequency (RF) filters based on bulk acoustic wave resonances in piezoelectric thin films have become indispensable components in mobile communications. The currently used material, AlN, exhibits many excellent properties for this purpose. However, i ...
EPFL2009Thick PZT sol-gel films for pMUT transducers performances improvement
Piezoelectric micromachined ultrasonic transducers comprising a 10 mu m thick Si device layer and a 14 pro thick piezoelectric PZT layer were investigated. The PZT films were deposited by a sol-gel technique. The transverse piezoelectric coefficient was me ...
2006Patterned and self-assembled ferroelectric nano-structures obtained by epitaxial growth and e-beam lithography
The continuous downscaling of microelectronic circuits combined with increasing interest in ferroelectric thin films for non-volatile random access memories (FeRAM) is drawing great attention to small ferroelectric thin film structures. There are various c ...
EPFL2004Enhanced performance of pyroelectric microsensors through the introduction of nanoporosity
Sol-gel process has successfully been applied for the deposition of porous PbZrxTi1-xO3 (x = 0.45, 0.15) thin films on platinized silicon wafers. Addition of a polymer as a volatile phase to the precursor sol prior to spin coating has been proved an excell ...
2004Ferroelectric and piezoelectric properties of Nb doped PZT films
Pb(Zr,Ti)O-3 (PZT) and Pb(Zr,Ti,Nb)O-3 (PNZT) thin films were grown on platinized silicon substrates by r.f. magnetron sputtering followed by a post-annealing treatment. The Niobium, Nb, concentration varied from 1 to 7 at.% by increment of 1 at.%. The eff ...
2001Ferroelectric thin films for micro-sensors and actuators: a review
This paper reviews deposition, integration. and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems. As examples, a piezoelectric ultrasonic micromotor and pyroelectric infrared detector array are ...
2000PZT thin films for microsensors and actuators: Where do we stand?
This paper reviews deposition, integration, and device fabrication of PbZrxTi1-xO3 (PZT) films for applications in micro-electromechanical systems. An ultrasonic micromotor is described as an example. A summary of the published data on piezoelectric proper ...
2000Stoichiometry and interdiffusion in PZT thin films studied by transmission electron microscopy
Nava Setter, Paul Muralt, Thomas Maeder, Stéphane Hiboux, Zian Kighelman
Electrode stability, interdiffusion, phase purity and deviation from stoichiometry at the PZT-electrode interface are key issues in PZT thin film integration. This article highlights the use of transmission electron imaging combined with energy dispersive ...
Materials Research Society / MRS1999