Concept

Microtechnique

Publications associées (32)

3D Integration Technology for Lab-on-a-Chip Applications

This study adds a new dimension to lab-on-a-chip systems by employing three-dimensional (3D) integration technology for improved performance, higher functionality, and on-chip computational power. Despite the extensive amount of current research on 3D memo ...

EPFL2012

Large Micromirror Array Based on a Scalable Technology for Astronomical Instrumentation

Michael David Canonica

Understanding the formation of galaxies and studying the expansion of the Universe, need the spectral characterization of faint astronomical objects such as stars or galaxies. From these spectra, the distance, the velocity and the chemical composition of t ...

EPFL2012

Vertical electrostatically 90° turning flaps for reflective MEMS display

Nico de Rooij, Wilfried Noell, Fabio Jutzi

A new kind of MEMS reflective display is being developed having high contrast and reflectivity, better than on printed paper. The system is based on novel vertical flaps, which can be electrostatically turned by 90° to horizontal position. After fabricatio ...

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2011

100 mm dynamic stencils pattern sub-micrometre structures

Jürgen Brugger, Andreea Veronica Savu, Shenqi Xie

Dynamic stencil lithography uses a moving shadow-mask to draw patterns by having directionally evaporated material deposited through the stencil apertures onto the substrate. Sub-micrometre, two- dimensional patterning is demonstrated at full 100 mm wafer ...

2011

Epitaxial Piezoelectric MEMS on Silicon

Don Isarakorn

Integration of new functional materials into silicon microsystems is a key factor to enable technology for a wide range of innovative MEMS devices. Piezoelectric materials are of primary interest for integrating sensing and actuation functions in MEMS due ...

EPFL2011

X-band MEMS technology for integrated Radar modules

Mihai Adrian Ionescu, Montserrat Fernandez-Bolanos Badia

This paper reports on the potential of RF-MEMS technology to improve and miniaturize new functions in Radar front end and antenna modules. The insertion of new MEMS components and subsystems, using RF-MEMS switches, filters and phase shifters, in radar fro ...

2009

MEMS technology for Radar front end modules.

Mihai Adrian Ionescu, Montserrat Fernandez-Bolanos Badia

2009

Focussed ion beam based fabrication of micro-electro-mechanical resonators

Mihai Adrian Ionescu, Daniel Grogg, Nicoleta-Diana Ciressan

Abstract: A simple and fast process to fabricate micro-electro-mechanical (MEM) resonators with deep sub-micron transduction gaps in thin SOI is presented. The proposed process is realized on both 350 nm and 1.5 μm thin silicon-on-insulator (SOI) substrate ...

Springer-Verlag2008

Polymer multilayer photonic micro- and nanostructures with tailored spectral properties

Amazing and beautiful optical effects are present in Nature. Some examples are the iridescent colors produced by peacocks, butterflies and beetles. While the simulations of some of these structures have already been realized, only a few elements have been ...

Institut de Microtechnique, Université de Neuchâtel2008

UWB and MEMS Based Indoor Navigation

Bertrand Merminod, Sylvain Pittet

Thanks to its physical characteristics, Ultra-wideband (UWB) is one of the most promising technologies for indoor pedestrian navigation. UWB radio localisation systems however experience multipath phenomena that decrease the precision and the reliability o ...

2008

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