Publications associées à Lithographie extrême ultraviolet

Biomimetic soft lithography on curved nanostructured surfaces

Jürgen Brugger, Thomas Kiefer, Valentin Flauraud, Vaida Auzelyte

In this paper a nano-molding process using a nature-created master is demonstrated. The eye of night moth Agotis exclamationis having 100 nm-scale structures on a curved surface is used as biomimetic master mold from which nanostructures are replicated ont ...

Elsevier2012

Optical characterization of subwavelength-scale solid immersion lenses

Hans Peter Herzig, Toralf Scharf, Myun Sik Kim

We present the fabrication and optical characterization of nano-scale solid immersion lenses (nano-SILs) with sizes down to a subwavelength range. Submicron-scale cylinders fabricated by electron-beam lithography (EBL) are thermally reflowed to form a sphe ...

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2012

Facile fabrication of nanofluidic diode membranes using anodic aluminium oxide

Jürgen Brugger, Philippe Renaud, Arnaud Bertsch, Fabien Patrick Wildhaber, Songmei Wu, Oscar Vazquez Mena

Active control of ion transport plays important roles in chemical and biological analytical processes. Nanofluidic systems hold the promise for such control through electrostatic interaction between ions and channel surfaces. Most existing experiments rely ...

Royal Soc Chemistry2012

Fabrication of Free-Standing Plasmonic Nanoantennas with Application for Optical Break Junctions

Olivier Martin, Christian Santschi, Banafsheh Abasahl

We report the fabrication of plasmonic nanoantennas with dimensions in the 200 - 300 nm range, suspended across a nano-undercut, which will be used for the investigation of the optical properties of break junctions. Nanochannels, fabricated using e-beam li ...

Ieee2012

Fabrication of sub-10 nm gap arrays over large areas for plasmonic sensors

Olivier Martin, Thomas Gerd Siegfried

We report a high-throughput method for the fabrication of metallic nanogap arrays with high-accuracy over large areas. This method, based on shadow evaporation and interference lithography, achieves sub-10 nm gap sizes with a high accuracy of 61.5 nm. Cont ...

American Institute of Physics2011

Optical Properties of UT-Shaped Plasmonic Nanoaperture Antennas

Hatice Altug, Arif Engin Cetin, Serap Aksu

In this paper, we present numerical and experimental results on optical properties of a multi-resonant UT-shaped plasmonic nanoaperture antenna for enhanced optical transmission and near-field resolution. We propose different structure designs in order to ...

SPIE-INT SOC OPTICAL ENGINEERING2011

Towards fabrication of Vertical Slit Field Effect Transistor (VeSFET) as new device for nano-scale CMOS technology

Jean-Michel Sallese, Didier Bouvet, Lucian Barbut

This paper proposes a CMOS based process for Vertical Slit Field Effect Transistors. The central part of the device, namely, the vertical slit, is defined by using electron beam lithography and silicon dry etching. In order to verify the validity and the r ...

IEEE2011

U-Shaped Nano-Apertures for Enhanced Optical Transmission and Resolution

Hatice Altug, Arif Engin Cetin, Serap Aksu

The subject of light transmission through optically thin metal films perforated with arrays of subwavelength nanoholes has recently attracted significant attention. In this work, we present experimental and calculated results on optical transmission/reflec ...

SPIE-INT SOC OPTICAL ENGINEERING2011

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Lithographie extrême ultraviolet

Biomimetic soft lithography on curved nanostructured surfaces

Optical characterization of subwavelength-scale solid immersion lenses

Facile fabrication of nanofluidic diode membranes using anodic aluminium oxide

Fabrication of Free-Standing Plasmonic Nanoantennas with Application for Optical Break Junctions

Reusable Nanostencils for Creating Multiple Biofunctional Molecular Nanopatterns on Polymer Substrate

Fabrication of sub-10 nm gap arrays over large areas for plasmonic sensors

Optical Properties of UT-Shaped Plasmonic Nanoaperture Antennas

Towards fabrication of Vertical Slit Field Effect Transistor (VeSFET) as new device for nano-scale CMOS technology

U-Shaped Nano-Apertures for Enhanced Optical Transmission and Resolution

Self Aligned Concentric Nanostructures Formed by E-beam Overexposure of PMMA and Single Post Processing Steps

Graph Chatbot

Chattez avec Graph Search

Reusable Nanostencils for Creating Multiple Biofunctional Molecular Nanopatterns on Polymer Substrate

Fabrication of sub-10 nm gap arrays over large areas for plasmonic sensors

Optical Properties of UT-Shaped Plasmonic Nanoaperture Antennas

Towards fabrication of Vertical Slit Field Effect Transistor (VeSFET) as new device for nano-scale CMOS technology

Self Aligned Concentric Nanostructures Formed by E-beam Overexposure of PMMA and Single Post Processing Steps

Biomimetic soft lithography on curved nanostructured surfaces

Facile fabrication of nanofluidic diode membranes using anodic aluminium oxide

Optical characterization of subwavelength-scale solid immersion lenses

Fabrication of Free-Standing Plasmonic Nanoantennas with Application for Optical Break Junctions

U-Shaped Nano-Apertures for Enhanced Optical Transmission and Resolution