Concept

Photolithographie

Publications associées (492)

Mechanically tuneable microoptical structure based on PDMS

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Victor Javier Cadarso Busto

A system of two solid microlenses with uncoupled optical properties is presented. This structure has been designed in order to have one lens as a reference, while the other one can be mechanically tuneable. The reference lens presents a diameter of 2 mu m ...

Elsevier2010

Hyperelastic pressure sensing with a liquid-embedded elastomer

A hyperelastic pressure transducer is fabricated by embedding silicone rubber with microchannels of conductive liquid eutectic gallium-indium. Pressing the surface of the elastomer with pressures in the range of 0-100 kPa will deform the cross-section of u ...

Institute of Physics2010

Self-aligned nanolithography by selective polymer dissolution

Francesco Stellacci

We report a novel approach to the fabrication of self-aligned nanoscale trench structures in a thin polymer layer covering on conductive materials. By passing AC current through a polymer-coated nanowire in the presence of an appropriate solvent, a self-al ...

2010

Mode Control of 1.3 proportional to m Wavelength Coupled VCSEL Arrays by Cavity Structuring

Elyahou Kapon, Benjamin Dwir, Alexandru Mereuta, Vladimir Iakovlev, Alexei Sirbu, Andrei Caliman, Elodie Lamothe, Lukas Mutter

Mode control in wafer-fused 1.3 mu m wavelength coupled-VCSEL arrays is achieved by cavity structuring and investigated by spectrally resolved near- and far-field measurements. Improved mode discrimination is attained by combining index- and gain-patternin ...

Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa2010

Magnetic Normal Modes in Squared Antidot Array With Circular Holes: A Combined Brillouin Light Scattering and Broadband Ferromagnetic Resonance Study

Dirk Grundler

We present a combined experimental investigation of magnetic normal modes in an antidot lattice using both Brillouin light scattering and broadband ferromagnetic resonance. It was fabricated on a silicon substrate using optical ultraviolet lithography. The ...

Institute of Electrical and Electronics Engineers2010

Engineered plasmonic nanoantenna arrays with nanostencil lithography

Hatice Altug, Serap Aksu, Min Huang

We demonstrate a novel approach for high-throughput and high-resolution fabrication of engineered infrared plasmonic antenna arrays with reusable nanostencils. Optical responses of these plasmonic antennas are comparable to that of arrays fabricated by ele ...

IEEE2010

Imaging based optofluidic air flow meter with polymer interferometers defined by soft lithography

Demetri Psaltis, Wuzhou Song

We present an optofluidic chip with integrated polymer interferometers for measuring both the microfluidic air pressure and flow rate. The chip contains a microfluidic circuit and optical cavities on a polymer which was defined by soft lithography. The pre ...

2010

Gas assisted focused electron beam induced etching of alumina

Patrik Willi Hoffmann, Tristan Bret, Bamdad Afra

This study investigates focused electron beam induced etching for the removal of alumina particles on patterned extreme ultra violet (EUV) mask using nitrosyl chloride (NOCl) as assist gas. As potential contaminant, particles of aluminum oxide (alumina, Al ...

2009

Fabrication of Memristors with Poly-Crystalline Silicon Nanowires

Giovanni De Micheli, Sandro Carrara

Memristors are the two-terminal components that complete the symmetry between the fundamental circuit variables, and they are highly suitable for bioinspired and neuralnetwork-based computational systems due to their inherent memory effect. In this paper w ...

2009

Complex nanostructures in PMMA made by a single process step using e-beam lithography

Nico de Rooij, Sebastian Gautsch, Michel Studer

We present results on the single step fabrication of autocentered nanopillars with surrounding circular rim. This particular 3-dimensional shape is created by the energy density distribution of incident and backscattered electrons and reflects the dual beh ...

2009

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