Concept

MEMS for in situ mechanical characterization

Résumé
MEMS for in situ mechanical characterization refers to microelectromechanical systems (MEMS) used to measure the mechanical properties (such as the Young’s modulus and fracture strength) of nanoscale specimens such as nanowires, nanorods, whiskers, nanotubes and thin films. They distinguish themselves from other methods of nanomechanical testing because the sensing and actuation mechanisms are embedded and/or co-fabricated in the microsystem, providing—in the majority of cases—greater sensitivity and precision. This level of integration and miniaturization allows carrying out the mechanical characterization in situ, i.e., testing while observing the evolution of the sample in high magnification instruments such as optical microscopes, scanning electron microscopes (SEM), transmission electron microscopes (TEM) and X-ray setups. Furthermore, analytical capabilities of these instruments such as spectroscopy and diffraction can be used to further characterize the sample, providing a com
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