MICRO-530: NanotechnologyThis course gives the basics for understanding nanotechnology from an engineer's perspective: physical background, materials aspects and scaling laws, fabrication and imaging of nanoscale devices.
ME-426: Micro/Nanomechanical devicesIn this course we will see an overview of the
exciting field of Micro and Nanomechanical systems. We will go over the dfferent scaling laws that dominate the critical parameters, how size affects mat
MICRO-707: Microstructuring of glassThe course will provide fundamental key aspects governing glass as a material and the microstructuring of glass using a variety of techniques, like dry and wet etching, mechanical and laser machining
MICRO-504: Photonic micro- and nanosystemsThis course aims at providing engineering and design guidelines for selected Photonic Micro- and Nanosystems. In particular, Optical MEMS and Integrated Photonics are reviewed. Standard fabrication pr
MICRO-514: Flexible bioelectronicsThe course is an introduction to the emerging field of flexible (bio)electronics. It provides an overview of the materials and processes used to design and manufacture flexible circuits and sensors.
