Publications associées à Microfabrication

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Microfabrication

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MEMS based nanopatterning

Microfabricated AFM probe with tungsten cantilever and < 40 nm pyramidal tip

Profile angle control in SIO2 deep anisotropic dry etching for MEMS fabrication

Fabrication and application of a full wafer size micro/nanostencil for multiple length-scale surface patterning

"MELODE" Membrane for local Deposition

All-photoplastic microstencil with self-alignment for multiple layer shadow-mask patterning

Photoplastic near-field optical probe with sub-100 nm aperture made by replication from a nanomould

Piezoelectric acoustic sensors and ultrasonic transducers based on textured PZT thin films

90 MHz nanomechanical structures fabricated by stencil deposition and dry etching

90 MHz nanomechanical structures fabricated by stencil deposition and dry etching

Microfabricated AFM probe with tungsten cantilever and < 40 nm pyramidal tip

MEMS based nanopatterning

Profile angle control in SIO2 deep anisotropic dry etching for MEMS fabrication

"MELODE" Membrane for local Deposition

Fabrication and application of a full wafer size micro/nanostencil for multiple length-scale surface patterning

Photoplastic near-field optical probe with sub-100 nm aperture made by replication from a nanomould

Piezoelectric acoustic sensors and ultrasonic transducers based on textured PZT thin films

All-photoplastic microstencil with self-alignment for multiple layer shadow-mask patterning

90 MHz nanomechanical structures fabricated by stencil deposition and dry etching

90 MHz nanomechanical structures fabricated by stencil deposition and dry etching