Concept

Microfabrication

Publications associées (307)

Deep-ultraviolet-microelectromechanicaI systems stencils for high-throughput resistless. patterning of mesoscopic structures

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

We describe a combination of 100-mm wafer scale deep-ultraviolet (DUV) exposure and a microelectromechanical systems (MEMS) process to fabricate silicon nitride membranes with submicrometer apertures to be used as miniature shadow masks or nanostencils. Ap ...

2004

Deep-ultraviolet–microelectromechanical systems stencils for high-throughput resistless patterning of mesoscopic structures

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

2004

Growth and Optical Characterization of Dense Arrays of Site-Controlled Quantum Dots Grown in Inverted Pyramids

Elyahou Kapon, Benjamin Dwir, Klaus Leifer, Martin Henrik Baier

We report on the growth and optical properties of dense arrays of single GaAs/AlGaAs quantum dot (QD) heterostructures with pitches as small as 300 nm. The samples were grown by organometallic chemical vapor deposition in dense inverted pyramids on {1 1 1} ...

2004

Microfabrication d'objets composites fonctionnels en 3D et à haut facteur de forme, par procédés UV-LIGA et microstéréolithographie

Sébastien Jiguet

The present thesis deals with new composite photoresists for the UV-LIGA and microstereolithography microfabrication processes. The aim is to build functional 3D objects, with high aspect ratio. Two projects have been investigated in parallel for each micr ...

EPFL2004

Fabrication of solid-state Nanopores for DNA analysis

Maïté Volatier

One of revolutionary technologies to sequence single molecules, such as DNA, is using nanopore devices. A single-channel with nanometer-scale aperture allows an extremely rapid electric analysis of such single molecules. The objective of this work is to fa ...

2004

Nanostenciling: a Versatile Approach for Surfaces Patterning

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

A versatile method for parallel nanoscale structures fabrication and patterning, using a combination of stencil-mask and pulsed-laser deposition (PLD) techniques is presented. A miniature shadow-mask with nano-apertures in a very thin microfabricated membr ...

2004

High-throughput surface patterning with wafer-sized stencils fabricated by a DUV/MEMS process

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

The endeavour to develop nanodevices demands for patterning methods in the nanometer scale. The continuous improvement in lithography methods based on deep UV (DUV), X-ray, or electron beam exposure allow for further progress in integrated circuit hardware ...

2004

Development of Insulated Conductive Probes with Platinum Silicide Tips for Atomic Force Microscopy in Cell Biology

Nico de Rooij, Terunobu Akiyama

A microfabrication process of a multifunctional probe is introduced for atomic force microscopy and various electrochemical measurements on biological samples in buffer solution. The silicon nitride probes have a spring constant lower than 0.1 N/m and a co ...

2004

Full-wafer stencils fabricated by a DUV/MEMS process for high-throughput patterning of mesoscopic structures

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

Photoresist-based lithography has major limitations when applied to micro-electro-mechanical systems (MEMS) with mechanically fragile and/or chemically functionalised surfaces. As a remedy, alternative, complementary nanopatterning methods have been develo ...

2004

DUV/MEMS based stencils for full-wafer scale, resistless, patterning of mesoscopic structures

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

Photoresist-based lithography has major limitations if applied to MEMS with mechanically fragile and chemically functionalized surfaces. As remedy, new alternative and complementary nanopatterning methods have been developed, such as thermo-mechanical inde ...

2004

Graph Chatbot

Chattez avec Graph Search

Posez n’importe quelle question sur les cours, conférences, exercices, recherches, actualités, etc. de l’EPFL ou essayez les exemples de questions ci-dessous.

AVERTISSEMENT : Le chatbot Graph n'est pas programmé pour fournir des réponses explicites ou catégoriques à vos questions. Il transforme plutôt vos questions en demandes API qui sont distribuées aux différents services informatiques officiellement administrés par l'EPFL. Son but est uniquement de collecter et de recommander des références pertinentes à des contenus que vous pouvez explorer pour vous aider à répondre à vos questions.

Connectez-vous pour utiliser Chat avec Graph Search