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This paper presents a microsystem consisting of an overhanging xy-microstage with integrated tip and comb actuators for scanning surface profiling. The design is optimized with respect to precise xy positioning at low drive voltages and accurate detection ...
A dual element, point, infra-red detector is being developed from a sol-gel deposited PbTiO3 thin-film on a micro-machined silicon substrate. Patterning of the ferroelectric film and the electrodes is accomplished by photolithographic techniques. Membranes ...
Mask-aligner lithography is traditionally performed using mercury arc lamps with wavelengths ranging from 250 nm to 600 nm with intensity peaks at the i, g and h lines. Since mercury arc lamps present several disadvantages, it is of interest to replace the ...
Recent developments and advances in micro-electro-mechanical systems for nanometer-scale applications such as scanning force microscopy are presented. The microfabrication of tools so small that they enable access to the nanoworid, such as tips, flexible c ...
Fabrication and characterization of a current-injected InGaAs-GaAs quantum-wire gain-coupled distributed feedback (DFB) laser operating at 77 K at a wavelength of 923 nm are presented, Threshold current densities in broad area lasers were measured to be as ...
This paper presents a comparative study of surface micromachined structures fabricated in three different materials, using torsional micromirrors as test vehicle. The devices are realized in single-crystal silicon, polycrystalline silicon and aluminum. Mec ...
A method is described to control the thickness of single-crystal silicon membranes, fabricated by wet anisotropic etching. The technique of an electrochemical etch-stop on an epitaxial layer is used to yield better thickness control over the silicon membra ...
