Publications associées à Interference lithography

Spontaneous formation of ordered micro-wrinkles on a thermosensitive resist

Jürgen Brugger, Giovanni Boero, Xia Liu, Ana Conde Rubio, Mohammadreza Rostami

Self-organizing patterns with micrometer-scale features are promising for applications in photonics and bioengineering. Their spontaneous formation reduces the number of required processing steps. Here, we report an approach to spontaneously form stochasti ...

2021

Thermomechanical Nanocutting of 2D Materials

Jürgen Brugger, Giovanni Boero, Xia Liu, Ana Conde Rubio, Samuel Tobias Howell

Atomically thin materials, such as graphene and transition metal dichalcogenides, are promising candidates for future applications in micro/nanodevices and systems. For most applications, functional nanostructures have to be patterned by lithography. Devel ...

2020

Single crystal diamond gain mirrors for high performance vertical external cavity surface emitting lasers

Niels Quack, Grigore Suruceanu, Alexandru Mereuta, Andrei Caliman, Pascal Gallo, Gergely Huszka, Mehdi Naamoun

We report on the design, fabrication and optical performance of gain mirrors in single crystal diamond substrates for vertical external cavity surface emitting lasers (VECSELs). VECSELs have gained attention recently due to their potential for high emissio ...

2020

Thermomechanical nanocutting of 2D materials using thermal scanning probe lithography

Jürgen Brugger, Giovanni Boero, Xia Liu, Ana Conde Rubio, Samuel Tobias Howell

The rapidly evolving field of 2D materials has developed a plethora of emerging micro/nano devices where atomically-thin materials play a fundamental role. In most cases, this implies the need of nanostructuring them, but due to their delicate nature, conv ...

2020

Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators

Luis Guillermo Villanueva Torrijo, Muhammad Faizan

In this paper, we demonstrate the fabrication and characterization of lithium niobate (LN) based Lamb wave mode (S0 and SH0) resonators that address the stringent requirements of RF filtering for modern communication systems. The devices consist of a 400 n ...

IOP PUBLISHING LTD2020

Real- and Q-space travelling: multi-dimensional distribution maps of crystal-lattice strain (epsilon(044)) and tilt of suspended monolithic silicon nanowire structures

Antonia Neels, Yusuf Leblebici, Alex Dommann, Zuhal Tasdemir, Simone Dolabella

Silicon nanowire-based sensors find many applications in micro- and nano-electromechanical systems, thanks to their unique characteristics of flexibility and strength that emerge at the nanoscale. This work is the first study of this class of micro- and na ...

INT UNION CRYSTALLOGRAPHY2020

Self-assembly of nanostructured glass metasurfaces via templated fluid instabilities

Hatice Altug, Fabien Sorin, Wei Yan, Filiz Yesilköy, Alexis Gérald Page, Yunpeng Qu, Dang Tùng Nguyen, Louis Marie Philippe Martin-Monier, Arthur Le Bris, Kuan-Ting Ho

Modern devices require the tuning of the size, shape and spatial arrangement of nano-objects and their assemblies with nanometre-scale precision, over large-area and sometimes soft substrates. Such stringent requirements are beyond the reach of conventiona ...

NATURE PUBLISHING GROUP2019

Printing sub-micron structures using Talbot mask-aligner lithography with a 193 nm CW laser light source

Toralf Scharf, Wilfried Noell, Raoul Kirner, Andreas Vetter

A continuous improvement of resolution in mask-aligner lithography is sought after to meet the requirements of an ever decreasing minimum feature size in back-end processes. For periodic structures, utilizing the Talbot effect for lithography has emerged a ...

2018

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Interference lithography

Spontaneous formation of ordered micro-wrinkles on a thermosensitive resist

Template-assisted electrodeposition of nickel and nickel copper 3D microcomponents

Diffractive optical elements in single crystal diamond

Thermomechanical Nanocutting of 2D Materials

Single crystal diamond gain mirrors for high performance vertical external cavity surface emitting lasers

Thermomechanical nanocutting of 2D materials using thermal scanning probe lithography

Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators

Real- and Q-space travelling: multi-dimensional distribution maps of crystal-lattice strain (epsilon(044)) and tilt of suspended monolithic silicon nanowire structures

Self-assembly of nanostructured glass metasurfaces via templated fluid instabilities

Printing sub-micron structures using Talbot mask-aligner lithography with a 193 nm CW laser light source

Graph Chatbot

Chattez avec Graph Search

Real- and Q-space travelling: multi-dimensional distribution maps of crystal-lattice strain (epsilon(044)) and tilt of suspended monolithic silicon nanowire structures

Printing sub-micron structures using Talbot mask-aligner lithography with a 193 nm CW laser light source

Diffractive optical elements in single crystal diamond

Thermomechanical Nanocutting of 2D Materials

Single crystal diamond gain mirrors for high performance vertical external cavity surface emitting lasers

Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators

Thermomechanical nanocutting of 2D materials using thermal scanning probe lithography

Self-assembly of nanostructured glass metasurfaces via templated fluid instabilities

Spontaneous formation of ordered micro-wrinkles on a thermosensitive resist

Template-assisted electrodeposition of nickel and nickel copper 3D microcomponents