Concept

Directed assembly of micro- and nano-structures

Résumé
Directed assembly of micro- and nano-structures are methods of mass-producing micro to nano devices and materials. Directed assembly allows the accurate control of assembly of micro and nano particles to form even the most intricate and highly functional devices or materials. Directed self-assembly Directed self-assembly (DSA) is a type of directed assembly which utilizes block co-polymer morphology to create lines, space and hole patterns, facilitating for a more accurate control of the feature shapes. Then it uses surface interactions as well as polymer thermodynamics to finalize the formation of the final pattern shapes. To control the surface interactions enabling sub-10 nm resolution, a team consisting of Massachusetts Institute of Technology, University of Chicago, and Argonne National Laboratory developed a way to use vapor-phase deposited polymeric top layer on the block co-polymer film in 2017. The DSA is not a standalone process, but rather is integrated wit
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