Concept
Infineon Technologies
Publications associées (6)
MEMS-Enabled Silicon Photonic Integrated Devices and Circuits
Niels Quack, Hamed Sattari, Alain Yuji Takabayashi, Yu Zhang
Photonic integrated circuits have seen a dramatic increase in complexity over the past decades. This development has been spurred by recent applications in datacenter communications and enabled by the availability of standardized mature technology platform ...
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC2020AlN and AlScN contour mode resonators for MEMS-based RF front ends
Miniaturization is a simple yet very powerful concept. Applied to devices, it opens to plethora of new applications. Microelectromechanical systems (MEMS) are the result of scaling down the dimensions of devices to the micron range or the nano range (NEMS) ...
EPFL2019A clean wafer-scale chip-release process without dicing based on vapor phase etching
A new method to release MEMS chips from a wafer without dicing is presented. It can be applied whenever SOI wafers are used that are structured from both the device and the handle side using DRIE. This method enables the release of extremely fragile struct ...
2004