Concept
Industrie des semi-conducteurs
Publications associées (136)
Thermal Analysis of the advanced single-stage planar actuator
The Advanced Single-stage Planar Actuator (ASPA) is a nanometer-accurate magnetically levitated planar actuator with moving magnets. It is designed at the Eindhoven University of Technology in collaboration with an industrial partner active in the semicond ...
2011Fabrication and design of nanoscale regular circuits
During many decades, Moore's law, which predicts an exponential increase in performance of semiconductor logic circuits and memories and an exponential decrease in their area, has proven its universal validity. It also helped the semiconductor industry pre ...
EPFL2009Micromirrors for integrated tunable mid-infrared detectors and emitters
The mid-infrared range is of interest in spectroscopic applications, due to the large number of organic compounds that exhibit characteristic absorption bands in this spectral region. Semiconductor technology, however, has been developed mainly for the nea ...
ETH2009Flip chip bonding technologies for hybrid integration
Hybrid integration and especially the packaging of microelectromechanical systems (i.e. MEMS) cannot rely on standardised packaging solutions due to the diversity of microsystems. As an example, the packaging requirements of a pressure sensor are different ...
Institut de Microtechnique, Université de Neuchâtel2009