Concept
Gravure ionique réactive
Personnes associées (58)
Niels Quack
Prof. Dr. Niels Quack received the M.Sc. degree from Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland, in 2005, and the Dr.Sc. degree from Eidgenössische Technische Hochschule Zürich (ETH), Zürich, Switzerland, in 2010. From 2011 to 2015, he was Postdoctoral Researcher and Visiting Scholar with the Integrated Photonics Laboratory, Berkeley Sensor and Actuator Center, University of California, Berkeley, CA, USA. From 2014 to 2015, he was Senior MEMS Engineer with Sercalo Microtechnology, Neuchâtel, Switzerland. He is currently an SNSF Assistant Professor with Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland. He has authored and co-authored more than 50 papers in leading technical journals and conferences. His research interests include photonic micro and nanosystems, with an emphasis on diamond photonics and silicon photonic MEMS. He is Steering Committee Member of the IEEE International Conference on Optical MEMS and Nanophotonics (OMN) and served as General Chair of the IEEE OMN 2018 and the Latsis Symposium 2019 on Diamond Photonics. He is a Senior Member of IEEE, Member of The Optical Society (OSA) and life member of SPIE.
Marc Ilegems
Marc Ilegems obtained degrees in Electrical Engineering from the University of Brussels in 1965 and a doctorate in Electrical Engineering from Stanford University in 1970. From 1969 to 1977 he was a Member of Technical Staff at the Solid State Electronics Research Laboratory, Bell Laboratories, Murray Hill. He joined the Ecole Polytechnique Federale (Swiss Federal Institute of Technology) in Lausanne in October 1977 as Professor and Director of the new Interdepartmental Institute of Microelectronics (1977-1983) and subsequently as Director of the Institute of Micro- and Optoelectronics (1983-2000) and of the Semiconductor Device Physics Laboratory (1983-2005).
Prof. Ilegems served as Dean of the Department of Physics from 1998 to 2000, and as Director of the Swiss National Centre of Competence in Research (NCCR) in Quantum Photonics (2001-2005), the Swiss Priority Program OPTICS (1993-1999) and the Swiss National Program on Micro- and Optoelectronics (1983-90). He is a member of the Scientific Council and has acted as expert and consultant for several national and European research organizations.
His current activities include technical and patent consulting for private organizations, contributions to the definition and management of research programs in the framework of bilateral collaborations between Poland, Hungary and Switzerland (2011-2017), and participation as member of various ICT and FET review panels within the Horizon 2020 programme.
Prof. Ilegems received an honorary doctorate from the University of Toulouse (1998) and the Heinrich Welker Award from the Compound Semiconductor Symposium (2006) for his contributions to III-V semiconductor materials and device research.
The research activities of the Semiconductor Device Physics Laboratory centred on the physics and technology of semiconductor devices. The main subjects of interest included quantum photonics (semiconductor microcavities, light emitting diodes, lasers and detectors), wide bandgap semiconductor nitrides, physics of nano and low-dimensional structures, high electron mobility transistors, crystal growth and materials technology. The research programs were carried out in close collaboration with numerous academic and industrial groups in Switzerland and abroad, in particular within the framework of programs of the European Community.
Earlier research topics pursued at Bell Laboratories and at EPFL include Molecular Beam Epitaxy and doping of GaAs and AlGaAs thin films with applications to heterostructure lasers, detectors, and Bragg mirrors, hydride vapor phase epitaxy and physical characterization of GaN on sapphire, liquid-solid phase diagrams of ternary III-V compound systems, and silicon-based non-volatile memory cells.
Prof. Ilegems is the author or co-author of over 250 scientific publications (citation index h = 48) and 7 book chapters, and has supervised over 30 doctoral students in Lausanne. His academic contacts include stays as invited professor at Stanford University (1994) and at the Polytechnic University of Madrid (2007).
Links:
- NCCR Quantum Photonics - http://nccr-qp.epfl.ch/
Sebastian Gautsch
Sebastian Gautsch est adjoint du directeur de section Microtechnique depuis février 2021.Il a obtenu son diplôme en électronique physique de l'Université de Neuchâtel en Suisse en 1998. Il a effectué son doctorat dans le domaine des microsystèmes à l'Institut de Microtechnique (IMT) de l'Université de Neuchâtel en 2001. Sa thèse en collaboration avec le Jet Propulsion Laboratory (JPL) de la NASA, a mené à l'envoi d'un Microscope à Force Atomique (AFM) à bord de la mission sur Mars Phoenix en 2008. Ce projet a été relaté de manière fréquente dans les medias nationaux . En parallèle à ses activités de recherche, et après avoir poursuivi une carrière internationale en natation jusqu'en 2003, il a obtenu le certificat fédéral en coaching du sport en 2007 délivré par l'association Swiss Olympic. Il a entraîné l'équipe élite du Red-Fish Neuchâtel entre 2004 et 2009 et a mis sur pied le projet de promotion de la natation olympique dans le canton de Neuchâtel. Il fut membre de la délégation d'entraîneurs lors de plusieurs événements internationaux de natation et qualifia plus de 20 nageurs pour des championnats européens, mondiaux et les jeux Olympiques de Pékin en 2008. Entre 2004 et 2013 il a dirigé les activités de recherche dans le domaine des outils en nanoscience à l'Institut de Microtechnique de l'EPFL au sein du laboratoire des capteurs, actionneurs et microsystèmes (SAMLAB) de Prof. Nico de Rooij. En 2011, il a également dirigé les activités d'écritures par faisceau d'électrons au Centre Suisse d'Electronique et de Microtechnique (CSEM). Il fut à l'origine de la création de la Société Mars Suisse dont il est actuellement le vice-président. Entre 2011 et 2018, il a enseigné à la haute école spécialisée du canton de Berne (BFH) dans le domaine des microtechniques et techniques médicales. Entre 2012 et 2020 il fut responsable de la coordination des stages industriels pour étudiants Master à la faculté des sciences et techniques de l'ingénieur (STI). Dans cette fonction, il a mis sur pied les projets de master coordonnés en entreprise , la journée industrie de la faculté STI, et le label stages durables. Entre 2018 et 2020 il fut responsable des activités d'outreach de la faculté STI, avec notamment les stages de recherche d'été E3 et le workshop Engineering PhD Summit. Page de Publications Google Scholar:
Philippe Flückiger
Since 1999 Philippe Flückiger is the Director of Operations at the EPFL Center of MicroNanoTechnology, a world-class state-of-the-art cleanroom dedicated to research and development in the field of MEMS. He received his diploma in physics from the University of Neuchâtel, Switzerland in 1987 and his PhD from the same University in 1993. His thesis work was dedicated to the deposition, patterning and characterization of high temperature superconductor epitaxial thin films. From 1993 to 1994 he was a post doc at Stanford University to develop submicron lithography with the atomic force microscope in the group of Calvin Quate, inventor of the AFM. From 1995 to 1997 he was successively process engineer, project manager and process engineering manager at Micronas SA in Bevaix, Switzerland, a microelectronics company producing baseband processors and voltage regulators for wireless applications, mostly ASICs for Nokia Mobile Phones. In 1997 he spent 4 months in the production line of EM Microelectronic Marin SA, Switzerland, a semiconductor manufacturer specialized in the design and production of ultra low power, low voltage integrated circuits for battery-operated and field-powered applications. He joined then the Swiss Federal Institute of Technology in Lausanne (EPFL) to start the new activity in diffusion, oxidation and CVD at the Center of MicroNanoTechnology. He was appointed Director of Operations of the Center in 1999.