Concept

Gravure ionique réactive

Publications associées (254)

Design and fabrication technology for high performance electrical pumped terahertz photonic crystal band edge lasers with complete photonic band gap

We detail the design and fabrication technology of two-dimensional photonic crystal (PhC) band edge emitting quantum cascade lasers (QCLs) operating at terahertz frequencies (similar to 3.3 THz). The entire QCL active layer has been deeply etched to form a ...

2010

The effect of deposition power on the electrical properties of Al-doped zinc oxide thin films

Santiago Serrano Guisan

We investigated the effect on the electronic properties of aluminum (Al)-zinc oxide (ZnO) films by modulating the radio frequency sputtering power. Our experimental results show that increasing the sputtering power increases the Al doping concentration, de ...

2010

High reflectivity airgap distributed Bragg reflectors realized by wet etching of AlInN sacrificial layers

Nicolas Grandjean, Jean-François Carlin, Raphaël Butté, Eric Feltin, Jacques Levrat, Antonino Francesco Castiglia, Alexei Altoukhov

The authors report on the achievement of a vertically oriented three pair airgap/GaN distributed Bragg reflector realized by controlled oxidation and wet-chemical etching of AlInN sacrificial layers. Microreflectivity measurements exhibit high peak reflect ...

2009

Fabrication of nanopore arrays and ultrathin silicon nitride membranes by block-copolymer-assisted lithography

Jeffrey Alan Hubbell, Harry Heinzelmann, Raphaël Pugin, Ana Maria Popa

Here we show a method for patterning a thin metal film using self-assembled block-copolymer micelles monolayers as a template. The obtained metallic mask is transferred by reactive ion etching in silicon oxide, silicon and silicon nitride substrates, thus ...

2009

High Strength Fused Silica Flexures Manufactured by Femtosecond Laser

Yves Bellouard

Flexures are mechanical elements used in micro- and precision-engineering to precisely guide the motion of micro-parts. They consist of slender bodies that deform elastically upon the application of a force. Although counter-intuitive at first, fused silic ...

2009

Bulk Lateral MEM Resonator on Thin SOI With High Q-Factor

Mihai Adrian Ionescu, Dimitrios Tsamados, Daniel Grogg, Marco Mazza, Hüseyin Cumhur Tekin, Nicoleta-Diana Ciressan

The fabrication, design, and characterization of high-quality factor microelectromechartical (MEM) resonators fabricated on thin-film silicon-on-insulators (SOIs) are addressed in this paper. In particular, we investigate laterally vibrating bulk-mode reso ...

Institute of Electrical and Electronics Engineers2009

Large area hole arrays fabricated by a templating method for refractive index sensing

Jürgen Brugger, Harry Heinzelmann, Mona Julia Katharina Klein, Bernard Wenger, Raphaël Pugin

Subwavelength hole arrays in thin gold films were fabricated in a low-cost and parallel fabrication process on 2" wafers. Polystyrene beads were used as an initial pattern template which is transferred into a thin gold film by sputter etching. Hole arrays ...

2009

Surface Nanopatterning by Polymer Self-Assembly: from Applied Research to Industrial Applications

Nicolas Blondiaux, Jeffrey Alan Hubbell, Raphaël Pugin, Martha Liley, Ana Maria Popa

Complementary methods have been developed for surface nanostructuring using molecular self-assembly, reactive ion etching and replication techniques. First, controlled surface nanostructures with tunable lateral dimensions from tens of nanometer to tens of ...

2009

Toward a better understanding of glass gravity-feed micro-hole drilling with electrochemical discharges

Rolf Wüthrich

Spark-assisted chemical engraving (SACE) is a flexible, simple and inexpensive method for machining electrically non-conductive materials. SACE is particularly interesting because of the high drilling speed that can be achieved compared to other micromachi ...

Institute of Physics2009

Fabrication and Characterization of 1-D diffusing elements

Hans Peter Herzig, Roland Andreas Bitterli, Toralf Scharf, Myun Sik Kim

Certain high power laser applications require thin homogeneous laser lines. In this paper we describe the concept, fabrication and characterization of a 1-D diffuser that generates such a line. The device is based on an array of concave cylinder lenses wit ...

2009

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