Scanning probe lithography (SPL) describes a set of nanolithographic methods to pattern material on the nanoscale using scanning probes. It is a direct-write, mask-less approach which bypasses the diffraction limit and can reach resolutions below 10 nm. It is considered an alternative lithographic technology often used in academic and research environments. The term scanning probe lithography was coined after the first patterning experiments with scanning probe microscopes (SPM) in the late 1980s.
The different approaches towards SPL can be classified by their goal to either add or remove material, by the general nature of the process either chemical or physical, or according to the driving mechanisms of the probe-surface interaction used in the patterning process: mechanical, thermal, diffusive and electrical.
Mechanical scanning probe lithography (m-SPL) is a nanomachining or nano-scratching top-down approach without the application of heat. Thermo-mechanical SPL applies heat together with a mechanical force, e.g. indenting of polymers in the Millipede memory.
Thermal scanning probe lithography
Thermal scanning probe lithography (t-SPL) uses a heatable scanning probe in order to efficiently remove material from a surface without the application of significant mechanical forces. The patterning depth can be controlled to create high-resolution 3D structures.
Thermochemical nanolithography
Thermochemical scanning probe lithography (tc-SPL) or thermochemical nanolithography (TCNL) employs the scanning probe tips to induce thermally activated chemical reactions to change the chemical functionality or the phase of surfaces. Such thermally activated reactions have been shown in proteins, organic semiconductors, electroluminescent conjugated polymers, and nanoribbon resistors. Furthermore, deprotection of functional groups (sometimes involving a temperature gradients), reduction of oxides, and the crystallization of piezoelectric/ferroelectric ceramics has been demonstrated.
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This course introduces advanced fabrication methods enabling the manufacturing of novel micro- and nanosystems (NEMS/MEMS). Both top-down techniques (lithography, stenciling, scanning probes, additive
This course gives the basics for understanding nanotechnology from an engineer's perspective: physical background, materials aspects and scaling laws, fabrication and imaging of nanoscale devices.
Nanolithography (NL) is a growing field of techniques within nanotechnology dealing with the engineering (patterning e.g. etching, depositing, writing, printing etc) of nanometer-scale structures on various materials. The modern term reflects on a design of structures built in range of 10−9 to 10−6 meters, i.e. nanometer scale. Essentially, the field is a derivative of lithography, only covering very small structures. All NL methods can be categorized into four groups: photo lithography, scanning lithography, soft lithography and other miscellaneous techniques.
Dip pen nanolithography (DPN) is a scanning probe lithography technique where an atomic force microscope (AFM) tip is used to create patterns directly on a range of substances with a variety of inks. A common example of this technique is exemplified by the use of alkane thiolates to imprint onto a gold surface. This technique allows surface patterning on scales of under 100 nanometers.
Les nanosciences et nanotechnologies (d’après le grec , « nain »), ou NST, peuvent être définies au minimum comme l’ensemble des études et des procédés de fabrication et de manipulation de structures (physiques, chimiques ou biologiques), de dispositifs et de systèmes matériels à l’échelle du nanomètre (nm), qui est l'unité la plus proche de la distance entre deux atomes. Les NST présentent plusieurs acceptions liées à la nature transversale de cette jeune discipline.
Couvre les principes et les applications de la microscopie par sonde à balayage, y compris les principes de fonctionnement, les différents systèmes et les applications d'imagerie.
Explore la lithographie par sonde à balayage pour les techniques de structuration à l'échelle nanométrique et ses applications dans l'exposition à l'AFM, le DPN et l'oxydation améliorée en champ local.
Recently, two-dimensional (2D) material based gas sensing, especially transition metal dichalcogenide-based sensing, has been widely investigated thanks to its room temperature sensing ability. Unlike