MICRO-605: Optical MEMS and micro-opticsMicro-optics and optical MEMS encompass a wide range of methods, devices and systems that enable precise, high-speed manipulation of light at the wavelength scale. MICRO605 provides a comprehensive i
MICRO-470: Scaling laws in micro & nanosystemsThis class adresses scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are discussed, across a broad range of actuation
MICRO-706: Microfluidics for lab-on-a-chipThe course covers the entire field of lab-on-a-chip technology, including microfluidic principles and various microfabrication approaches, and presenting concrete examples of devices for (bio)analysis
EE-330: Digital IC designDigital IC Design presents the fundamentals of digital integrated circuit design. The methods and techniques aiming at the fabrication and development of digital integrated circuits are reviewed, the
MICRO-707: Microstructuring of glassThe course will provide fundamental key aspects governing glass as a material and the microstructuring of glass using a variety of techniques, like dry and wet etching, mechanical and laser machining
EE-532: Integrated circuits technologyThis course will give an overview of some of the most relevant aspects of CMOS technology used to design and fabricate integrated circuits.
Current research and challenges brought about by shrinking F
