Publications associées à Gravure (microfabrication)

A CMOS-Compatible, Low-Loss, and Low-Crosstalk Silicon Waveguide Crossing

Yi Zhang, Christophe Marcel Georges Galland

We demonstrated a waveguide crossing for submicron silicon waveguides with average insertion loss of 0.18±0.03 dB and crosstalk of -41±2 dB, uniform across an 8-inch wafer. The device was fabricated in a CMOS-compatible process using 248 nm lithography, wi ...

Institute of Electrical and Electronics Engineers2013

Applications of dry photoresist film for printed and flexible electronics

Nico de Rooij, Danick Briand, Andres Felipe Vasquez Quintero

This work presents three applications of dry photoresist film for printed and flexible electronics devices. First, as part of the flexible encapsulation of printed gas sensors (i.e. humidity). This process was performed at relatively low temperatures (85 ° ...

2013

Amorphous/crystalline silicon interface defects induced by hydrogen plasma treatments

Christophe Ballif, Duncan Thomas Lindsay Alexander, Jonas Geissbühler, Stefaan De Wolf, Loris Barraud, Johannes Peter Seif, Bénédicte Demaurex

Excellent amorphous/crystalline silicon interface passivation is of extreme importance for high-efficiency silicon heterojunction solar cells. This can be obtained by inserting hydrogen-plasma treatments during deposition of the amorphous silicon passivati ...

American Institute of Physics2013

Large-scale, in-situ integration of horizontal carbon nanotube arrays into gas sensing devices

Mihai Adrian Ionescu, Montserrat Fernandez-Bolanos Badia, Hoël Maxime Guérin

The successful experimental demonstration of large-scale and in-situ growth of horizontal, dense and aligned carbon nanotube (CNT) arrays is presented. This new CNT growth process is developed for the direct integration of nanotubes into gas sensing device ...

2013

Constitutive analysis of the mechanical anisotropy of Opalinus Clay

Lyesse Laloui, Bertrand François, Mathieu Nuth, Simon Salager

This paper aims to analyse the anisotropic features of behaviour of Opalinus Clay using the theory of plastic multi-mechanisms. The results of triaxial tests conducted with different load levels and directions showed that the mechanical behaviour of this s ...

Springer Verlag2013

Electrical contacts to single nanowires: a scalable method allowing multiple devices on a chip. Application to a single nanowire radial p-i-n junction

Martin Heiss, Anna Dalmau Mallorquí, Carlo Colombo, Pierre Loïc Blanc

Semiconductor nanowires are currently at the forefront of research in the areas of nanoelectronics and energy conversion. In all these studies, realising electrical contacts and statistically relevant measurements is a key issue. We propose a method that e ...

Inderscience2013

Memristive-Biosensors: A New Detection Method by Using Nanofabricated Memristors

Giovanni De Micheli, Sandro Carrara, Davide Sacchetto, Yusuf Leblebici, Camilla Baj-Rossi

This paper proposes a new detection methodology based on memristive-effect registered on silicon nanowire. The nano-wires are fabricated by a lithographic technique that allows precise and selective etching at the nanoscale. The wires are obtained in three ...

Elsevier2012

Méthode de décapage sélective d'un matériau sur un substrate en quartz par l'utilisation d'un faisceau -induit

Patrik Willi Hoffmann, Michel Rossi, Tristan Bret, Xavier Multone

A method and apparatus for local beam processing using a beam activated gas to etch material are described. Compounds are disclosed that are suitable for beam-induced etching. The invention is particularly suitable for electron beam induced etching of chro ...

2012

Chattez avec Graph Search

Posez n’importe quelle question sur les cours, conférences, exercices, recherches, actualités, etc. de l’EPFL ou essayez les exemples de questions ci-dessous.

AVERTISSEMENT : Le chatbot Graph n'est pas programmé pour fournir des réponses explicites ou catégoriques à vos questions. Il transforme plutôt vos questions en demandes API qui sont distribuées aux différents services informatiques officiellement administrés par l'EPFL. Son but est uniquement de collecter et de recommander des références pertinentes à des contenus que vous pouvez explorer pour vous aider à répondre à vos questions.

Gravure (microfabrication)

Fabrication and Optoelectronic Properties of Graphene Nanoribbons

A CMOS-Compatible, Low-Loss, and Low-Crosstalk Silicon Waveguide Crossing

Applications of dry photoresist film for printed and flexible electronics

Opportunities for high-pressure microfluidics in biomedical applications

Amorphous/crystalline silicon interface defects induced by hydrogen plasma treatments

Large-scale, in-situ integration of horizontal carbon nanotube arrays into gas sensing devices

Constitutive analysis of the mechanical anisotropy of Opalinus Clay

Electrical contacts to single nanowires: a scalable method allowing multiple devices on a chip. Application to a single nanowire radial p-i-n junction

Memristive-Biosensors: A New Detection Method by Using Nanofabricated Memristors

Méthode de décapage sélective d'un matériau sur un substrate en quartz par l'utilisation d'un faisceau -induit

Graph Chatbot

Chattez avec Graph Search

Fabrication and Optoelectronic Properties of Graphene Nanoribbons

A CMOS-Compatible, Low-Loss, and Low-Crosstalk Silicon Waveguide Crossing

Applications of dry photoresist film for printed and flexible electronics

Constitutive analysis of the mechanical anisotropy of Opalinus Clay

Memristive-Biosensors: A New Detection Method by Using Nanofabricated Memristors

Large-scale, in-situ integration of horizontal carbon nanotube arrays into gas sensing devices

Electrical contacts to single nanowires: a scalable method allowing multiple devices on a chip. Application to a single nanowire radial p-i-n junction

Méthode de décapage sélective d'un matériau sur un substrate en quartz par l'utilisation d'un faisceau -induit

Amorphous/crystalline silicon interface defects induced by hydrogen plasma treatments

Opportunities for high-pressure microfluidics in biomedical applications