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Jean-Marc Breguet

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Publications associées (37)

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Nanoindentation cracking in gallium arsenide: Part I. In situ SEM nanoindentation

Johann Michler, Jacques Giovanola, Jean-Marc Breguet, Cédric Pouvreau

The nanoindentation fracture behavior of gallium arsenide (GaAs) is examined from two perspectives in two parent papers. The first paper (part I) focuses on in situ nanoindentation within a scanning electron microscope (SEM) and on fractographic observatio ...

Cambridge University Press2013

Nanoindentation cracking in gallium arsenide: Part II. TEM investigation

Johann Michler, Jacques Giovanola, Jean-Daniel Ganière, Jean-Marc Breguet, Cédric Pouvreau

The nanoindentation fracture behavior of gallium arsenide (GaAs) is examined from two perspectives in two parent papers. In the first paper (part I), we address the morphology of the crack field induced by different types of indenters by means of in situ n ...

Cambridge University Press2013

The Femtoprint Project

Yves Bellouard, Reymond Clavel, Jean-Marc Breguet

The Femtoprint project, a European project, aims at demonstrating the use of low-energy laser pulses (i.e. below the ablation threshold) to manufacture monolithically integrated devices including optofluidic, optomechanical and photonic devices. The longer ...

2012

Electron Microscopy Mechanical Testing of Silicon Nanowires Using Electrostatically Actuated Tensile Stages

Reymond Clavel, Johann Michler, Jean-Marc Breguet, Dongfeng Zhang

Two types of electrostatically actuated tensile stages for in situ electron microscopy mechanical testing of 1-D nanostructures were designed, microfabricated, and tested. Testing was carried out for mechanical characterization of silicon nanowires (SiNWs) ...

2010

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Uniaxial quasi-static tensile testing on individual nanocrystalline Co nanowires (NWs), synthesized by electrochemical deposition process (EDP) in porous templates, was performed inside a scanning electron microscope (SEM) using a microfabricated tensile s ...

2009

A high-sensitivity and quasi-linear capacitive sensor for nanomechanical testing applications

Reymond Clavel, Johann Michler, Jean-Marc Breguet, Dongfeng Zhang

The design, modeling, fabrication and characterization of triplate differential capacitive sensors employed in novel on-chip tensile and compression material testing systems are reported, where the capacitive sensors are integrated to measure the load on t ...

2009

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This paper presents a novel goniometer which is designed for use with X-ray diffraction analysis in protein crystallography. The PRIGO (Parallel Robotics Inspired Goniometer) is a 6 degree of freedom positioning device, allowing 3 translations (x, y, z) an ...

2009

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Monolithic actuators have turned out to be an efficient solution to several design and assembly problems associated with inertial drive positioning systems. In addition to their compact size with a possible thickness below 1.5 mm, the modular actuators pre ...

2008

Anewanalytical modeling approach for piezoelectric bending elements is described. The approach is based on the beam theory under quasi-static equilibrium condition. It uses the theory of superposition of piezoelectric action in the bender and external mome ...

2007

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This paper presents a few examples of manipulators and micro-robots based on piezo-actuators developed during the last 4 years in the Laboratoire de Systèmes Robotiques (LSRO) at EPFL. Three working principles will be described (bender, inch-worm, inertial ...

2007