Publications de Ivo Utke | EPFL Graph Search

Optimizing Atomic Layer Deposition Processes with Nanowire-Assisted TEM Analysis

Atomic layer deposition (ALD) is one of the premier methods to synthesize ultra-thin materials on complex surfaces. The technique allows for precise control of the thickness down to single atomic layers, while at the same time providing uniform coverage ev ...

Wiley2024

Single Superparamagnetic Bead Detection and Direct Tracing of Bead Position Using Novel Nanocomposite Nano-Hall Sensors

Giovanni Boero, Ivo Utke, Laurent Bernau

We show that nanocomposite materials consisting of superparamagnetic nanoparticles embedded in a matrix are very good candidates for a novel generation of Hall nanosensors with high spatial and magnetic resolution, capable of detecting superparamagnetic be ...

Institute of Electrical and Electronics Engineers2013

Polarisation stabilisation of vertical cavity surface emitting lasers by minimally invasive focused electron beam triggered chemistry

Elyahou Kapon, Ivo Utke, Alexandru Mereuta, Vladimir Iakovlev, Alexei Sirbu, Andrei Caliman, Martin Jenke

2011

Granular Co-C nano-Hall sensors by focused-beam-induced deposition

Giovanni Boero, Ivo Utke, Laurent Bernau

We investigated the performance of Hall sensors with different Co-C ratios, deposited directly in nanostructured form, using Co-2(CO)(8) gas molecules, by focused-electron or ion-beam-induced deposition. Due to the enhanced intergrain scattering in these g ...

2010

Gas-assisted focused electron beam and ion beam processing and fabrication

Patrik Willi Hoffmann, Ivo Utke

Beams of electrons and ions are now fairly routinely focused to dimensions in the nanometer range. Since the beams can be used to locally alter material at the point where they are incident on a surface, they represent direct nanofabrication tools. The aut ...

2008

Fabrication of arrays of sub-wavelength nano-apertures in an optically thick gold layer on glass slides for optical studies

Theo Lasser, Patrik Willi Hoffmann, Benjamin Dwir, Ivo Utke, Marcel Leutenegger, Alexandre Perentes

We report on the fabrication of two-dimensional arrays of nano-optical apertures in gold layers by electron beam lithography (EBL) on a transparent glass substrate. 30 x 30 μ m(2) large arrays of high aspect ratio sub-wavelength cylinders (400 nm diameter ...

2005

Cross section investigations of compositions and sub-structures of tips obtained by focused electron beam induced deposition

Philippe Buffat, Patrik Willi Hoffmann, Marco Cantoni, Christian Santschi, Danièle Laub, Johann Michler, Ivo Utke

The spatial evolution of compositions and sub-structures inside focused-electron-beam-deposited tips from dicobalt-octacarbonyl Co2(CO)8 precursor at 25 keV and varying beam current (20 pA - 3 A) is extensively studied for the first time by means of energy ...

2005