Personne
Ramin Matloub Aghdam
Publications associées (13)
Fabrication, Characterization, and Simulation of Glass Devices with AlN Thin-Film Transducers for Excitation of Ultrasound Resonances
Paul Muralt, Ramin Matloub Aghdam
We present the fabrication of 570-mu m-thick millimeter-sized soda-lime-silicate float-glass blocks with a 1-mu m-thick AlN thin-film piezoelectric transducer sandwiched between thin metallic electrodes and deposited on the top surface. The electromechanic ...
AMER PHYSICAL SOC2021Resonant Pzt Mems Mirror With Segmented Electrodes
Paul Muralt, Ramin Matloub Aghdam, Mohssen Moridi
We report a transduction optimization method of piezo-based MEMS structures using segmentation of the excitation electrodes. Optimal transduction is achieved by matching the electric field distribution to the polarization distribution including the direct ...
IEEE2020Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces
Paul Muralt, Ramin Matloub Aghdam, Silviu Cosmin Sandu, Stefan Mertin, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko
Sputter deposited Al(1-x)ScxN thin films with a Sc content from x = 0 to 43 at% are investigated by electron microscopy in order to study and explain the formation and growth of abnormally oriented grains (AOG). It is found that the latter did not nucleate ...
WILEY-V C H VERLAG GMBH2019Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN
Paul Muralt, Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Ramin Matloub Aghdam, Kaitlin Marie Howell, Waqas Bashir
Ultrathin aluminum nitride (AlN) films are of great interest for integration into nanoelectromechanical systems for actuation and sensing. Given the direct relationship between crystallographic texture and piezoelectric (PZE) response, x-ray diffraction ha ...
2019A concept of wireless and passive very-high temperature sensor
Paul Muralt, Ramin Matloub Aghdam, Andrea Mazzalai
There is a need for sensors capable operating at temperatures above 1000 degrees C. We describe an innovative sensor that might achieve this goal. The sensor comprises two main elements: a thermocouple and a surface acoustic wave (SAW) strain sensor. The c ...
Amer Inst Physics2017Hybrid BAW/SAW AlN and AlScN Thin Film Resonator First Experimental data
Paul Muralt, Ramin Matloub Aghdam, Vladimir Pashchenko, Sylvain Ballandras
A novel type of hybrid resonator based on BAW transformation into SAW in a ridged layered structure was fabricated and characterized. Bulk waves are excited by micromachined piezoelectric AlScN pillars located on the non-piezoelectric Si and sapphire subst ...
Ieee2016