Publications de Nahid Hosseini

Fabrication of fluid-compatible trilayer cantilevers with integrated piezoelectric actuators

Luis Guillermo Villanueva Torrijo, Georg Fantner, Damien Maillard, Nahid Hosseini, Matthias Neuenschwander, Mustafa Kangül

Microcantilevers are popular transducers thanks to their simple design and a high sensitivity. In many applications, the cantilevers need to be actuated, either to induce a controlled deflection or to excite the resonance. This can be achieved with integra ...

2025

A polymer-semiconductor-ceramic cantilever for high-sensitivity fluidcompatible microelectromechanical systems

Dirk Grundler, Georg Fantner, Nahid Hosseini, Marcos Penedo Garcia, Oliver Peric, Santiago Harald Andany, Matthias Neuenschwander

Active microelectromechanical systems (MEMS) with integrated electronic sensing and actuation can provide fast and sensitive measurements of force, acceleration and biological analytes. Strain sensors integrated onto MEMS cantilevers are widely used to tra ...

Springer Science and Business Media LLC2024

Self-Actuated Polymer-Based Cantilevers With Sharp Silicon Tips For High-Speed Atomic Force Microscopy

Georg Fantner, Nahid Hosseini, Santiago Harald Andany, Matthias Neuenschwander

High-speed atomic force microscopy has thus far largely been limited to the use of small cantilevers in liquid, but the technique would greatly profit areas of nanotechnology that require the use of larger probes in air. We present polymer-based cantilever ...

IEEE2021

A novel microfabrication platform for hybrid multilayer MEMS

Nahid Hosseini

In Atomic force microscopy (AFM), the tip-sample interaction force can be measured through two primary detection techniques: optical beam detection (OBD) and electrical (self-sensing) readout. Compared to the optical method, the convenience of the self-sen ...

EPFL2019

Integration of sharp silicon nitride tips into high-speed SU8 cantilevers in a batch fabrication process

Georg Fantner, Nahid Hosseini, Jonathan David Adams, Oliver Peric, Santiago Harald Andany, Matthias Neuenschwander

Employing polymer cantilevers has shown to outperform using their silicon or silicon nitride analogues concerning the imaging speed of atomic force microscopy (AFM) in tapping mode (intermittent contact mode with amplitude modulation) by up to one order of ...

Beilstein Institut2019

Air and Water-Stable n-Type Doping and Encapsulation of Flexible MoS2 Devices with SU8

Andras Kis, Yen-Cheng Kung, Georg Fantner, Dumitru Dumcenco, Nahid Hosseini

2018

Digitally controlled analog proportional-integral-derivative (PID) controller for high-speed scanning probe microscopy

Georg Fantner, Maja Dukic Pjanic, Nahid Hosseini, Adrian Pascal Nievergelt, Santiago Harald Andany, Chen Yang

Nearly all scanning probe microscopes (SPMs) contain a feedback controller, which is used to move the scanner in the direction of the z-axis in order to maintain a constant setpoint based on the tip-sample interaction. The most frequently used feedback con ...

2017

Rise time reduction of thermal actuators operated in air and water through optimized pre-shaped open-loop driving

Georg Fantner, Nahid Hosseini, Tom Larsen

Electrothermal actuators have many advantages compared to other actuators used in micro-electro-mechanical systems (MEMS). They are simple to design, easy to fabricate and provide large displacements at low voltages. Low voltages enable less stringent pass ...

2017

Design of a high-bandwidth tripod scanner for high speed atomic force microscopy

Georg Fantner, Chen Yang, Nahid Hosseini, Maja Dukic Pjanic, Jie Zhao

Tip-scanning high-speed atomic force microscopes (HS-AFMs) have several advantages over their sample-scanning counterparts. Firstly, they can be used on samples of almost arbitrary size since the high imaging bandwidth of the system is immune to the added ...

2016

A monolithic MEMS position sensor for closed-loop high-speed atomic force microscopy

Georg Fantner, Nahid Hosseini, Adrian Pascal Nievergelt, Jonathan David Adams

The accuracy and repeatability of atomic force microscopy (AFM) imaging significantly depend on the accuracy of the piezoactuator. However, nonlinear properties of piezoactuators can distort the image, necessitating sensor-based closed-loop actuators to ac ...

2016