K-band single-chip electron spin resonance detector

We report on the design, fabrication, and characterization of an integrated detector for electron spin resonance spectroscopy operating at 27 GHz. The microsystem, consisting of an LC-oscillator and a frequency division module, is integrated onto a single silicon chip using a conventional complementary metal-oxide-semiconductor technology. The achieved room temperature spin sensitivity is about 10(8) spins/G Hz(1/2), with a sensitive volume of about (100 mu m)(3). Operation at 77 K is also demonstrated. (C) 2012 Elsevier Inc. All rights reserved.