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A clean wafer-scale chip-release process without dicing based on vapor phase etching

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A clean wafer-scale chip-release process without dicing based on vapor phase etching

Graph Chatbot

Chattez avec Graph Search

High aspect ratio sub-micron trenches on silicon-on-insulator and bulk silicon

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

Reversed processing of dry photoresist: application to the encapsulation of chemical sensors

Method for fabricating micromirror for barcode reader, involves forming holes having diameter less than width of arms on both side of micromirror and wafer and on edges of region separating wafer and micromirror by etching arms

Wafer-Scale Fabrication of Thin SiN Membranes and Au Films and Membranes with Arrays of Sub-um Holes Using Nanosphere Lithography

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Copper / low-k technological platform for the fabrication of high quality factor above-IC passive devices

Dry etching for the correction of gap-induced blurring and improved pattern resolution in nanostencil lithography

Fabrication of silicon nano wires and gate-all-around MOS devices

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

Dry etching for the correction of gap-induced blurring and improved pattern resolution in nanostencil lithography

Method for fabricating micromirror for barcode reader, involves forming holes having diameter less than width of arms on both side of micromirror and wafer and on edges of region separating wafer and micromirror by etching arms

Fabrication of MEMS Resonators in Thin SOI

High aspect ratio sub-micron trenches on silicon-on-insulator and bulk silicon

Copper / low-k technological platform for the fabrication of high quality factor above-IC passive devices

Wafer-Scale Fabrication of Thin SiN Membranes and Au Films and Membranes with Arrays of Sub-um Holes Using Nanosphere Lithography

Reversed processing of dry photoresist: application to the encapsulation of chemical sensors

Fabrication of silicon nano wires and gate-all-around MOS devices