Publication
This paper describes the fabrication technique for the realization a microfluidic flow cell to be integrated on a CMOS biosensor for DNA hybridization detection. The main element of the microfluidic system is made in polydimethylsiloxane (PDMS) elastomer and takes up an area of 5 mm(2). PDMS is cast against a silicon master patterned by Deep Reactive Ion Etching (DRIE) and then bonded on the chip by means of oxygen plasma activation. The micro channels patterned in the flow cell are connected with capillary tubes that can be easily interconnected to a common syringe.
Fabien Sorin, René M. Rossi, Efe Armagan, Claudio Toncelli, Akin Gürsoy
Simon Nessim Henein, Charles Baur, Andrea Lovera, Ilan Vardi, Mohamed Gamal Abdelrahman Ahmed Zanaty, David Lambelet, Thomas Jean Julien Fussinger, Arno Rogg