Reliable MEMS Actuators for Driving Large Microsystems
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For the first time we have characterized a micromotor driven by a piezoelectric PZT (PbZrxTi1-xO3) thin film. Sputter and sol-gel techniques have been applied for the deposition of the PZT films onto a silicon stator membrane, which is 20-30 mu m thick and ...
The stereochemical course of hydrolysis catalysed by four Aspergillus aculeatus enzymes acting on alpha-L-rhamnosyl and alpha-D-galacturonosyl linkages in the hairy regions of pectins has been determined using H-1-NMR. Exogalacturonase acts with inversion ...
Motor parts produced by casting are subjected to particularly high local stresses and must be reinforced by high-strength inserts. The insertion is normally made mechanically after casting, but, if good adhesion could be obtained, it would be preferable to ...
We report on recent advances in micro fabrication technology using micromoulding and high-aspect ratio structuring of photopolymer. The direct application is the realization of components for millimeter-size, ultrasonic piezoelectric motors. A new fabricat ...
NOVELTY - For control mono-phase or multiphase machines in motor or generating mode with or without pulse width modulation. USE - Control of electrical rotating machines. ADVANTAGE - Can be used for control of single phase and three phase machines. DETAILE ...
We report on recent advances in micro fabrication technology using micromolding and high aspect ratio structuring of photopolymer. The direct application is the realization of components for millimeter-size, ultrasonic piezoelectric motors. A new fabricati ...
This paper describes a detailed study of the behavior of the parallel spring stage having four circular flexure hinges of very thin cross-sections manufactured by wire electro-discharge machining. The state of the art recalls the abundant literature publis ...