Structuration of the low temperature co-fired ceramics (LTCC) using novel sacrificial graphite paste with PVA–propylene glycol–glycerol–water vehicle
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This work presents the preliminary results on application of mineral sacrificial layer that is prepared to structure LTCC (low temperature co-fired ceramic). The proposed method suggests utilization of a sacrificial paste, which remains "permanent" during ...
We describe a novel surface micromachining process for the fabrication of ceramic-type MEMS devices, such as free-standing cantilevers, that is based on the use of high-aspect ratio micromolds of SU8 and aluminum as sacrificial layer. 250μm-high and 100-10 ...
