Publication
Besides their excellent dielectric and thermo-mechanical characteristics Low Temperature Cofiring Ceramics (LTCC) are also well suited for the fabrication of 3D micromechanical components such as sensors for mechanical quantities. This paper describes the development of such sensors covering some material and technological aspects. Furthermore, the design process for mechanical sensors is discussed as well as application examples of sensors for the detection of pressure, force, acceleration and flow.
Simon Nessim Henein, Loïc Benoît Tissot-Daguette, Benoît Dagon, Michal Stanislaw Smreczak
Romain Christophe Rémy Fleury, Rayehe Karimi Mahabadi, Taha Goudarzi
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