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The state-of-the-art mass sensing so far has been rather developed along the resolution axis, reaching atomic-scale detection, than into the direction of high-speed. This paper reports a novel self-calibrating technique, making high-speed inertial mass sensors capable of instant high-resolution particle detection and weighing. The sensing nanoelectromechanical resonator is embedded into a phase-locked loop and the sensor-inherent nonlinear phase-frequency relation is exploited for auto-calibration. A tunable on-chip carbon nanotube based mass balance serves as a case study of small-size and low-cost environmental and healthcare applications. Tunability and a phase-locked loop topology make the system widely universal and invariant to nanotube characteristics. Operational for tube eigenfrequencies up to 385 MHz, the circuit integration in a 180 nm technology achieves instantaneous zeptogram resolution, while yoctogram precision is obtained within the tenth of a second. These figures of merit range at the physical limits of carbon nanotube resonators, in both mass- and time-resolution. (C) 2014 Elsevier Ltd. All rights reserved
Jian Wang, Olivier Schneider, Yiming Li, Yi Zhang, Aurelio Bay, Guido Haefeli, Christoph Frei, Frédéric Blanc, Tatsuya Nakada, Michel De Cian, Luca Pescatore, François Fleuret, Elena Graverini, Chitsanu Khurewathanakul, Renato Quagliani, Maria Vieites Diaz, Federico Betti, Andrea Merli, Aravindhan Venkateswaran, Luis Miguel Garcia Martin, Vitalii Lisovskyi, Sebastian Schulte, Veronica Sølund Kirsebom, Mingkui Wang, Zhirui Xu, Lei Zhang, Jessica Prisciandaro, Mark Tobin, Minh Tâm Tran, Niko Neufeld, Matthew Needham, Marc-Olivier Bettler, Greig Alan Cowan, Maurizio Martinelli, Vladislav Balagura, Donal Patrick Hill, Liang Sun, Pietro Marino, Mirco Dorigo, Xiaoxue Han, Liupan An, Federico Leo Redi, Plamen Hristov Hopchev, Thibaud Humair, Maxime Schubiger, Hang Yin, Guido Andreassi, Violaine Bellée, Olivier Göran Girard, Axel Kuonen, Preema Rennee Pais, Pavol Stefko, Tara Nanut, Maria Elena Stramaglia, Tommaso Colombo, Vladimir Macko, Guillaume Max Pietrzyk, Evgenii Shmanin, Dipanwita Dutta, Zheng Wang, Yi Wang, Hans Dijkstra, Gerhard Raven, Peter Clarke, Frédéric Teubert, Giovanni Carboni, Victor Coco, Adam Davis, Paolo Durante, Wenyu Zhang, Yu Zheng, Anton Petrov, Maxim Borisyak, Feng Jiang, Chen Chen, Zhipeng Tang