Development of a MEMS Preconcentrator for Micro-gas Chromatography Analyses

This paper presents the development of MEMS gas preconcentrator (GP) for the detection of trace level Volatile Organic Compounds (VOCs). Besides the development of the MEMS gas preconcentrator, we have also worked on the coupling of this preconcentration device with a micro gas chromatograph (μ-GC) for achieving an accurate detection system for gas trace monitoring. Preliminary results have highlighted a significant contribution of the MEMS GP on the μ-GC efficiency and a detection limit below 35ppbv for different vapors like toluene, vinyl acetate monomer, chloroform and methylisobutylketone was reported. © 2014 Published by Elsevier Ltd.