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The research efforts for silicone based elastomers with high dielectric permittivity (epsilon') intensified significantly in the last years since such materials would allow the construction of dielectric elastomer actuators (DEA) with low operation voltages. Polar groups can be introduced to elastomers to adjust their permittivity. The results obtained regarding the functionalization of silicones with polar nitrile (CN) and trifluoropropyl (CF3) groups are presented. Those with CN groups were synthesized via anionic polymerization of nitrile containing cyclosiloxanes or via a post-polymerization modification of functional polysiloxanes. Polysiloxanes containing CF3 groups were prepared by anionic co-polymerization of 1,3,5-tris(3,3,3-trifluoropropyl)-1,3,5-trimethylcyclosiloxane with octamethylcyclotetrasiloxane. Importantly, we have found that all polysiloxanes have glass transition temperatures (T-g) well below room temperature (
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