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3D monolithic dielectrophoretic actuators and resonators written by femtosecond laser

Publications associées (189)

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Large Hybrid High Precision MEMS Mirrors

Dara Zaman Bayat

This thesis presents the design and microfabrication technology of a tip-tilt, 2 degree of freedom "mirror system" made out of Silicon On Insulator (SOI) wafers with two movable mirrors that have diameter of 10 mm. The system was intended for precise beam ...

EPFL2011

Microsystems and Sensors

Yves Bellouard

In this chapter, the use of femtosecond laser to fabricate glass-based microsystems and sensors is examined. Several advanced technology demonstrators are presented, including some very unusual fused silica MEMS. Present technological barriers are discusse ...

Springer Berlin Heidelberg2011

On the bending strength of fused silica flexures fabricated by ultrafast lasers [Invited]

Yves Bellouard

This paper reports on the mechanical properties of fused silica flexures manufactured by a two-step process combining femtosecond lasers exposure below the ablation threshold and chemical etching. Flexural strengths as high as 2.7 GPa were measured, demons ...

Optical Society of America2011

Thesis plan proposal February 2011

Aleksandra Zabuga

The research proposal describes the spectroscopic technique to study the intermediate state of protonated peptides formed after the UV excitation. It was shown previously that with the assistance of the CO2 laser the side chain loss fragmentation was enhan ...

2011

Characterization of Nanoparticles Using Non-linear Correlation Spectroscopy

Theo Lasser, Marcel Leutenegger, Iwan Märki, Jean-Pierre Wolf, Noelia Laura Bocchio, Luigi Bonacina

Nanoparticles are interesting for biomedical imaging as novel non- fluorescent non-bleaching labels. We present the characterization of freely diffusing nanoparticles using third harmonic generation correlation spectroscopy by illumination with a focussed ...

2011

Tunable and Broadband Nanostructured Photonic Devices

Pierre-Yves Baroni

The main topic of this thesis is the fabrication and characterization of structures smaller than the wavelength of light, for operation in the visible or near infrared spectral range. In the first part of this thesis, the fabrication of periodic structures ...

EPFL2010

Femtosecond laser micromachining of fused silica molds

Yves Bellouard

The use of low-energy femtosecond laser beam combined with chemical etching has been proven to be an efficient method to fabricate three-dimensional structures in fused silica. For high-volume application, this technology – like other serial processes – su ...

Optical Society of America2010

Ink-jet printed colorimetric gas sensors on plastic foil

Nico de Rooij, Danick Briand, Jérôme Courbat

An all polymeric colorimetric gas sensor with its associated electronics for ammonia (NH3) detection targeting low-cost and low-power applications is presented. The gas sensitive layer was inkjet printed on a plastic foil. The use of the foil directly as o ...

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2010

Ink-jet printed colorimetric gas sensors on plastic foil

Nico de Rooij, Danick Briand, Jérôme Courbat

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2010

Deformable Silicon Membrane for Dynamic Linear Laser Beam Diffuser

Hans Peter Herzig, Roland Andreas Bitterli, Jonathan Masson, Toralf Scharf, Wilfried Noell

We present a dynamic laser beam shaper based on MEMS technology. We show a prototype of a dynamic diffuser made of single crystal silicon. A linearly deformable silicon micromembrane is used to diffuse a laser beam in one dimension. Resonance frequencies o ...

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2010