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Ion beam etching redeposition for 3D multimaterial nanostructure manufacturing

Publications associées (35)

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In-plane fabrication of insulated gold-tip probes for electrochemical and force spectroscopy molecular experiments

Nico de Rooij, Terunobu Akiyama, Sebastian Gautsch, Peter Van der Wal, Yexian Wu

A new and versatile fabrication process of insulated gold tip probes for atomic force microscopy (AFM) is presented by Wu et al. (In-plane fabricated insulated gold-tip probe for electrochemical and molecular experiments, in: 2013 IEEE 26th International C ...

Elsevier2014

Dynamic ornament: An investigation of responsive thermochromic surfaces in architecture

Jeffrey Huang, Mark Meagher, David Van der Maas, Christian Abegg

This paper describes the use of environmental sensor data as a basis for the design of architectural ornament that takes on a distinctive appearance in response to the atmospheric conditions where it is located. Among the goals of the project were the iden ...

2013

Méthode de décapage sélective d'un matériau sur un substrate en quartz par l'utilisation d'un faisceau -induit

Patrik Willi Hoffmann, Michel Rossi, Tristan Bret, Xavier Multone

A method and apparatus for local beam processing using a beam activated gas to etch material are described. Compounds are disclosed that are suitable for beam-induced etching. The invention is particularly suitable for electron beam induced etching of chro ...

2012

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We present results on the single step fabrication of autocentered nanopillars with surrounding circular rim. This particular 3-dimensional shape is created by the energy density distribution of incident and backscattered electrons and reflects the dual ...

2010

Analysis of a reconfigurable reflectarray cell comprising a multitude of MEMS control elements

Julien Perruisseau-Carrier

This paper discusses the analysis of reflectarray cells comprising MEMS control elements. The method employed allows a very fast and accurate analysis of the reflectarray cell performance, quasi independently of the number of embedded MEMS and reconfigurab ...

2010

Silicon nanowire AFM tips grown on released scanning probe cantilevers from stencil-deposited catalysts

Jürgen Brugger, Andreea Veronica Savu

We present a parallel, full wafer technique for deposition of catalyst on released scanning probe bodies for the growth of individual high aspect-ratio Si nanowire tips. 1-D probes are necessary for imaging high aspect-ratio nano-patterns, such as deep and ...

2010

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2009

Nano-Tera.CH: Nano-technologies for Tera-scale Problems

Giovanni De Micheli

The Nano-Tera.CH initiative is a broad engineering program in Switzerland for health and security of humans and the environment, currently funded by the Swiss government. The program rationale is rooted in advances in engineering nano-scale materials and t ...

IEEE2009

The coupling of stimuli-responsive macromolecules to nanostructured surfaces opens the perspective for the fabrication and integration of "smart" micro- and nano-electro-mechanical systems (MEMS&NEMS) in which the smallest motile unit is the polymeric chai ...

EPFL2009

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Abstract: A simple and fast process to fabricate micro-electro-mechanical (MEM) resonators with deep sub-micron transduction gaps in thin SOI is presented. The proposed process is realized on both 350 nm and 1.5 μm thin silicon-on-insulator (SOI) substrate ...

Springer-Verlag2008