Dielectric Actuation Techniques at the Nanoscale: Piezoelectricity and Flexoelectricity
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A micromotor for low power applications is being developed using silicon micromachining technologies and organometallic PZT films sol-gel deposition. The construction of a hybrid ultrasonic motor suitable for batch fabrication is proposed. A fabrication pr ...
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Pyroelectric thin-film point detectors and 1 x 12 arrays have been fabricated and characterized. They consist of sol-gel-deposited PZT thin-film elements on micromachined Si3N4/SiO2 membranes. The measured current and voltage response as a function of modu ...
The direct piezoelectric effect in fine and coarse grain barium titanate ceramics is examined as a function of the external alternating and static pressure. It is found that domain wall vibrations contribute to the piezoelectric effect in both types of cer ...
In the present study, piezoelectric, conductivity and dielectric measurements have been performed on virgin and fatigued ferroelectric PZT thin films prepared by spin-on sol-gel deposition process on Si/SiO2/Ti/Pt substrates. By fatiguing, the polarisation ...
Ferroelectric, dielectric and piezoelectric properties of ferroelectric thin films and ceramics are reviewed with the aim of providing an insight into different processes which may affect the behaviour of ferroelectric devices, such as ferroelectric memori ...
Through the use of relations analogous to that of the Rayleigh law, it is demonstrated that the ac electric field dependence of the permittivity of ferroelectric thin films can be described. It is further shown that both reversible and irreversible compone ...
The fatigued state of Pt-PZT-Pt ferroelectric capacitors (FECAP) was investigated by means of piezoelectric coefficient, polarisation charge and permittivity measurements. The suppression of switching polarisation P-r(s) appears to be the result of freezin ...
