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Development of Lamb wave resonators in thin film X-cut lithium niobate

Publications associées (52)

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Miniaturization is a simple yet very powerful concept. Applied to devices, it opens to plethora of new applications. Microelectromechanical systems (MEMS) are the result of scaling down the dimensions of devices to the micron range or the nano range (NEMS) ...

EPFL2019

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This paper presents the first phase noise (PN) measurements of oscillators based on aluminum scandium nitride (AlScN) resonators. 2-port AlScN contour mode resonators (CMR) operating at 195 MHz arc fabricated. A large pool of Q values (ranging from 150 to ...

IEEE2019

Multimode microwave circuit optomechanics as a platform to study coupled quantum harmonic oscillators

Nathan Rafaël Bernier

Harmonic oscillators might be one of the most fundamental entities described by physics. Yet they stay relevant in recent research. The topological properties associated with exceptional points that can occur when two modes interact have generated much int ...

EPFL2019

Micromechanical resonators with sub-micron gaps filled with high-k dielectrics

Mariazel de la Candelas Maqueda López

Scaled microelectromechanical (MEMS) resonating devices have generated a great interest for their use in RF front-end architectures for wireless communication, channel-select filters, on-chip signal processing and timing and extreme mas sensing application ...

EPFL2017

Programmability is one of the most significant advantages of a digital phase-locked loop (PLL) compared with a charge-pump PLL. In this paper, a digital PLL that extends programmability to include noise is introduced. A digitally controlled oscillator (DCO ...

IEEE2017

Frequency stability of PZE actuated suspended micro-channel resonators

Annalisa De Pastina

Nanoelectromechanical (NEMS) resonators have shown outstanding performance in mass sensing and heavy filtering applications due to their exceptional sensitivities and high quality factors. Examples of applications range from biomolecules/gas detection to e ...

2017

Internet of Things (IoT), which is one of the main talking points in the electronics industry today, consists of a number of highly miniaturized sensors and actuators which sense the physical environment around us and communicate that information to a cent ...

EPFL2016

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Frequency stability is key to the performance of nanoresonators. This stability is thought to reach a limit with the resonator's ability to resolve thermally induced vibrations. Although measurements and predictions of resonator stability usually disregard ...

Nature Publishing Group2016

Solid-gap resonators based on PVDF-TrFE

Mihai Adrian Ionescu, Mariazel de la Candelas Maqueda López, Wolfgang Amadeus Vitale, Emanuele Andrea Casu

High frequency wine-glass mode bulk MEMS resonators actuated by means of capacitive transduction have been fabricated by using solid-gaps based on polyvinylidenefluoride-trifluoroethylene (PVDF-TrFE). The fabrication process flow of patterned PVDF-TrFE gap ...

IEEE2016

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The energy dissipated by conventional phase-locked-loop-based transmitters (TXs) during the long startup phase is a major bottleneck that reduces the energy autonomy of duty-cycled ultra-low-power systems. In order to tackle this problem, this paper presen ...

Institute of Electrical and Electronics Engineers2015