We demonstrate monocrystalline growth of GeSn on Ge and Si substrates by co-sputtering. We discuss the evolution of film growth with thickness, elucidating the effects of substrate temperature, sputtering source, and the importance of hydrogen dilution in the plasma.
Mohammad Khaja Nazeeruddin, Hiroyuki Kanda, Albertus Adrian Sutanto, Nadja Isabelle Desiree Klipfel
Nadja Isabelle Desiree Klipfel