Co-Sputtered Monocrystalline GeSn for Infrared Photodetection

Anna Fontcuberta i Morral, Anna Krammer, Andrea Giunto, Josef Andreas Schuler, Luc Burnier, Nicolas Philippe Laurent Humblot
2020
Article de conférence

Résumé

We demonstrate monocrystalline growth of GeSn on Ge and Si substrates by co-sputtering. We discuss the evolution of film growth with thickness, elucidating the effects of substrate temperature, sputtering source, and the importance of hydrogen dilution in the plasma.

Source officielle

https://infoscience.epfl.ch/record/283384?ln=fr

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Co-Sputtered Monocrystalline GeSn for Infrared Photodetection

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