Publication

Co-Sputtered Monocrystalline GeSn for Infrared Photodetection

Anna Fontcuberta i Morral, Anna Krammer, Andrea Giunto, Josef Andreas Schuler, Luc Burnier, Nicolas Philippe Laurent Humblot
2020
Conference paper

Abstract

We demonstrate monocrystalline growth of GeSn on Ge and Si substrates by co-sputtering. We discuss the evolution of film growth with thickness, elucidating the effects of substrate temperature, sputtering source, and the importance of hydrogen dilution in the plasma.

Official source

https://infoscience.epfl.ch/record/283384?ln=en

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Co-Sputtered Monocrystalline GeSn for Infrared Photodetection

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