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High-K Dielectric NEMS

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High-K Dielectric NEMS

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Fabrication of 2d Material Based Resonators

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SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

Nanomechanical Silicon Resonators with Intrinsic Tunable Gain and Sub-nW Power Consumption

Advances in Nanostenciling: resistless nanopatterning enables new applications

In-plane fabrication of insulated gold-tip probes for electrochemical and force spectroscopy molecular experiments

Fabrication of 2d Material Based Resonators

Fluorescence based low-cost microbiosensors using simultaneously microfabrication process and enzyme immobilisation

PROOF OF CONCEPT OF A NOVEL OPTICAL GLUCOSE ENZYME-BASED MICRO-BIOSENSOR USING SU-8

Study of Silicon Nitride resonators for optomechanics and security applications

In-Plane Fabricated Insulated Gold-Tip Probe For Electrochemical And Molecular Experiments

Nanomechanical Silicon Resonators with Intrinsic Tunable Gain and Sub-nW Power Consumption

Advances in Nanostenciling: resistless nanopatterning enables new applications

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography