Evaluation of secondary electron intensities for dopant profiling in ion implanted semiconductors: a correlative study combining SE, SIMS and ECV methods

This study evaluates the secondary electron (SE) dopant contrast in scanning electron microscopy (SEM) and helium ion microscopy (HIM) on boron implanted silicon sample. Complementary techniques like secondary ion mass spectrometry and electrochemical capacitance voltage (ECV) measurements are used to understand the dopant profile and active dopant distribution before and after a thermal firing, a step carried out to remove implantation damage and to electrically activate the implanted boron. Thermal firing resulted in an activation efficiency of 33%. HIM showed higher contrast than SEM having more defined peak with a lower background contribution. Variations in dopant concentration near the peak maximum were observed in ECV measurements, which was not observed in the intensity profiles from both SEM and HIM. This study demonstrates the effectiveness of SE dopant profiling as a quick tool to map the electrically active dopant concentrations even in far-from-equilibrium materials such as ion implanted samples.

Free carriers in nanocrystalline titanium dioxide thin films

Simon Springer

This thesis analyzes the properties of heavily doped nanocrystalline titanium dioxide. Thin films were deposited by magnetron sputtering with either water vapor as reactive gas or a periodically interrupted oxygen supply. The samples were at the same time electrically conducting and transparent. They consisted of mixtures of rutile, anatase and amorphous phases. Titanium dioxide is chemically stable, hard, non-toxic, transparent, and inexpensive. Due to a high refractive index it is often found in optical applications as a thin film coating. For many purposes it is interesting to take advantage of a combination of good transparency and electrical conductivity. An even larger field of applications would open if the electric conductivity of TiO2 could be increased in a controlled manner. Conventional bulk doping is limited, however, by low solubility limits. Highly conducting nanocrystalline TiO2 thin films have been obtained recently by sputtering in presence of water vapor. The present project intends to elucidate the doping mechanisms at work in such films. In addition, an alternative process to achieve grain-boundary doping of TiO2 was explored. Spectrophotometry over a wide spectral range (0.05 to 5 eV) was the main tool in probing the mobile electrical charge carriers. The interpretation of these optical measurements required appropriate models. The models developed took many structural properties into account, such as thickness, surface roughness, density, anisotropy and crystalline phase composition. The phase and morphology of the films were analyzed by X-ray diffraction and reflection, scanning probe microscopy, and electron microscopy. The chemical analyses included electron-probe microanalyses, Rutherford backscattering and elastic recoil detection analysis. The DC electrical properties were measured between room temperature and 250 °C. Most water-deposited samples showed semiconducting behavior with an activation energy of the order of 100 meV. The optical measurements revealed a broad absorption band around 1 eV. The absorption coefficient scaled with conductivity. It was successfully modelled as a Lorentzian. Similar absorption bands have been reported for reduced rutile and anatase single crystals. Water-deposited samples containing anatase exhibited a metallic behavior. In these samples the thermal activation energy was reduced to about 30 meV and the charge carriers displayed a high mobility (3 cm2V-1s-1). The infrared absorption band was about 10 times less important than in the samples devoid of anatase. Thin films of TiO2 intercalated with the equivalent of nanometer-thick layers of Ti were prepared. By changing the period in the oxygen supply the grain size, and thereby the film properties, could be modified. The films obtained in this way had many properties in common with water-deposited films. They showed the same absorption band in the infrared, had comparable charge carrier densities and were electrically conductive (102 to 104 Sm-1 at room temperature). To our knowledge, this was the first time that such high electrical conductivities were achieved by sputtering in an oxygen plasma.

EPFL2004

Toxicity study of nanostructures

Lenke Horváth

The great achievement of nanotechnology is the controlled synthesis of a large variety of nanometer-size materials like needle-formed nanotubes, nanowires and two-dimensional graphene flakes. Due to their unique physico-chemical properties, these nanostructures are considered to be of great benefit for many applications in engineering, electronics, alternative energies and nanomedicine. Since the expectations for the improvement of our everyday life through engineered nanomaterials are high, there is rapid expansion of their manufacturing, which makes it likely that intentional and unintentional human and environmental exposure will increase in the near future. Consequently, the concern grows, related to their possible health hazards, as some of them strongly resemble asbestos. Motivated by this issue, we have investigated the in vitro acute cellular toxicity associated with four model nanomaterials: carbon nanotubes, boron nitride nanotubes, titanium dioxide nanofilaments and graphene oxide. This study focused on the toxic effect these nanomaterials had on cell types found in the respiratory system, where exposure to these materials is most prominent. These are lung epithelial cells, macrophages, and fibroblasts, but also other cell types like kidney cells were tested. The cytotoxicity was assessed by using MTT, DNA and FMCA assays, which measure different endpoints such as metabolic activity, cell proliferation and viable cell number. The cell death was determined by the Annexin V assay. We employed various microscopic techniques: light microscopy to reveal the morphological alterations associated with the nanomaterial toxicity at the cellular level; scanning electron microscopy to study the cell-nanomaterial interactions on the surface of the cell membrane; transmission electron microscopy to examine the uptake and subsequent localization of the nanomaterials within the cytosol and cell organelles. In addition, the generation of intracellular reactive oxygen species induced by graphene oxide was detected by the DCF assay. Last but not least, the pro-inflammatory potential and the biochemical perturbations in cells exposed to boron nitride nanotubes were investigated by Western blot and Synchrotron Infrared Microspectroscopy (SIRMS), respectively. All these techniques point to the adverse effects of the investigated nanostructures: i) The toxic effect of carbon nanotubes and carbon nanoparticles showed a time- and dose-dependent impairment in the metabolic activity of the cells characteristic for each cell type. Moreover, distinct morphological alterations typical for cell death were particularly apparent in macrophages. ii) The toxic potential of boron nitride nanotubes exhibited more pronounced adverse effects than carbon nanotubes. This was demonstrated by cell viability assays combined with cytopathological and biochemical analyses, showing induction of serious morphological changes, particularly in macrophages and fibroblasts, and biochemical processes characteristic for cell death. A higher acute toxicity was determined for boron nitride nanotubes when compared to crocidolite asbestos and their pro-inflammatory potential was demonstrated by the secretion of mature IL-1β cytokine in macrophages. iii) Titanium dioxide nanofilaments were also shown to impair the metabolic activity of the studied cells and induce morphological changes pointing to cell insult. iv) Graphene oxide exhibited a mild cytotoxic action in comparison to carbon nanotubes on epithelial cells and macrophages. The interaction of the nanomaterial with the cell surface generated reactive oxygen species during the initial phase of the exposure and transmission electron microscopy showed that graphene oxide flakes are taken up via the endocytic pathway. In summary, our findings highlight important physico-chemical parameters, which are important in relation to the toxic effect of nanomaterials. These are: i) the chemical composition; ii) the surface modification including functionalized groups and structural defects; iii) the geometry: length, diameter and tortuosity. In addition to the identified nanomaterial characteristics, we pinpoint that the target cells ́ response depends on their type, which is likely to be linked to their physiological function.

EPFL2012

Microscopic chevron-notch fracture test of hard second phases

Marco Cantoni, Andreas Mortensen, Martin Guillermo Mueller, Václav Pejchal, Aparna Singh, Goran Zagar

It is well understood that the intrinsic mechanical properties of reinforcements and second phases strongly influence those of composite materials and alloys; however, these properties are challenging to determine due to the small size and irregular shape of the particles. We present a method for the measurement of the fracture toughness of micron-sized specimens based on Focused Ion Beam (FIB) milling, combined with micro-mechanical testing techniques and Finite Element (FE) simulation. Microscopic chevron-notched cantilever beams are first machined. These beams are subsequently loaded using a nanoindentation testing apparatus. It is found that the crack initiates at the chevron notch tip under a load that is in most tests lower than that corresponding to the onset of crack instability. Some degree of stable crack growth can thus be observed and meaningful toughness measurements gleaned on these small tested volumes. The measurements are furthermore minimally influenced by milling-induced defects given that, at the onset of unstable growth, most of the crack front is situated away from the FIB-machined surface. Test data are interpreted using compliance calibration curves determined by three‑dimensional FE simulation of each beam, after measurement of its dimensions using electron microscopy. The method is applied to nanocrystalline Nextel ™ 610 alumina fibres, which are used in aluminium-matrix composites. Results are consistent with expected values for the material at hand, suggesting that the technique is reliable despite the small specimen size, and that it can be transposed to other reinforcements. The influence on the test of environmentally induced subcritical crack growth, known to be operative with alumina in air, is also examined.